Precise Linear Positioning Method Based on Transmissive Two-Stage Diffraction Grating System
2021 ◽
Vol 2083
(2)
◽
pp. 022037
Keyword(s):
Abstract This paper mainly studies the precise linear positioning method based on the transmissive type two-stage diffraction grating system. Starting from the analysis of the two-stage diffraction principle, the mathematical model of the two-stage grating diffraction is established, and the positioning characteristics of the differential positioning method and the modified positioning method are discussed. The simulation experiment of the linear positioning device is carried out to study the displacement characteristics. The experimental results show that the precise positioning based on the diffraction grating can obtain a positioning accuracy of ±0.4 μm.
2014 ◽
Vol 511-512
◽
pp. 227-233
2017 ◽
Vol XLII-2/W7
◽
pp. 531-535