Studies on the Thermal Stability of Ni/n–GaN and Pt/n–GaN Schottky Barrier Diodes

2016 ◽  
Vol 3 (8) ◽  
pp. 085901 ◽  
Author(s):  
Ashish Kumar ◽  
Somna Mahajan ◽  
Seema Vinayak ◽  
R Singh
1990 ◽  
Vol 201 ◽  
Author(s):  
C. S. Park ◽  
J. S. Lee ◽  
J. W. Lee ◽  
J. Y. Kang ◽  
J. Y. Lee

AbstractA low energy ion beam assisted deposition (IBAD) technique has been developed to fabricate refractory W-Si-N films for the application to gate electrode of GaAs metal-semiconductor field effect transistors( MESFETs ). Thermal stability of the IBAD refractory metal/n-GaAs interface was investigated by examining the microstructure and Schottky diode characteristics. The Schottky barrier heights of 0.71, 0.84, and 0.76 eV were obtained after thermal annealing at 850°C for the W/, WN0.27/, and WSi0.3N0.4/GaAs diodes, respectively, and these values are comparable to those of the best results published with conventional reactive sputtering. While some crystalization of the deposit and reaction between film and substrate at the interface were observed with TEM for the W/ and WN/GaAs contacts annealed at 800°, the WSiN film remained amorphous and showed clear interface with the GaAs substrate without significant morphological change. The WS0.3N0.4/GaAs diode showed good thermal stability of Schottky barrier heights with only 20 meV variation in the temperature range between 700 and 850°C, and that is proposed to be due to the stable microstructure.


2001 ◽  
Vol 46 (5) ◽  
pp. 584-586 ◽  
Author(s):  
A. V. Afanas’ev ◽  
V. A. Il’in ◽  
I. G. Kazarin ◽  
A. A. Petrov

2019 ◽  
Vol 7 (35) ◽  
pp. 10953-10960 ◽  
Author(s):  
Hojoong Kim ◽  
Sinsu Kyoung ◽  
Taiyoung Kang ◽  
Jang-Yeon Kwon ◽  
Kyung Hwan Kim ◽  
...  

β-Ga2O3Schottky barrier diodes (SBDs) were demonstrated with Ni Schottky contact deposited by the confined magnetic field-based sputtering (CMFS) method.


2020 ◽  
Vol 117 (1) ◽  
pp. 013504 ◽  
Author(s):  
Eszter Piros ◽  
Stefan Petzold ◽  
Alexander Zintler ◽  
Nico Kaiser ◽  
Tobias Vogel ◽  
...  

1987 ◽  
Vol 92 ◽  
Author(s):  
T. E. Haynes ◽  
C. C. Han ◽  
S. S. Lau ◽  
S. T. Picraux ◽  
W. K. Chu

ABSTRACTSputtered TaSix films on GaAs have been examined as potential refractory Schottky barrier contacts suitable for self-aligned gate fabrication of GaAs MESFETs. The thermal stability of electrical and physical characteristics has been studied following furnace annealing or rapid thermal processing of contacts with compositions near Ta5Si3 (x=06). The electrical characteristics, interface interdiffusion, and evaporation loss of Ga and As through the contact have been examined. The barrier heights of 30-min furnaceannealed contacts were found to increase with temperature over the range 600 to 900°C. The Schottky barrier heights after rapid thermal processing (RTP) of the contacts were fixed at 0.78 eV for temperatures in the range 700 to 900°C. A major finding of this work is that the Schottky barrier contact maintains its integrity even though the equivalent of at least 5 monolayers of Ga and As have decomposed and evaporated through the contact.


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