Effect of methane flow rate on microstructure and tribological properties of (Cu, Ce)/Ti co-doped DLC films fabricated via reactive magnetron sputtering technology

Materials Research Express ◽

10.1088/2053-1591/aad07c ◽

2018 ◽

Vol 5 (7) ◽

pp. 076405 ◽

Author(s):

Yang-Min Wu ◽

Li-Qiu Ma ◽

Sheng-Guo Zhou ◽

Wen-Jie Zhao ◽

Lu Ouyang

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Flow Rate ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Methane Flow Rate ◽

Co Doped ◽

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Fabrication of low-resistive p-type Al–N co-doped zinc oxide thin films by RF reactive magnetron sputtering

Physica B Condensed Matter ◽

10.1016/j.physb.2009.08.170 ◽

2009 ◽

Vol 404 (23-24) ◽

pp. 4846-4849 ◽

Author(s):

Hsin-Chun Lu ◽

Jo-Ling Lu ◽

Chi-You Lai ◽

Gwo-Mei Wu

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

P Type ◽

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Band gap modulation of ZnTe1-xOx alloy film by control of oxygen gas flow rate during reactive magnetron sputtering

Applied Physics Letters ◽

10.1063/1.4856375 ◽

2013 ◽

Vol 103 (26) ◽

pp. 263901 ◽

Author(s):

Dong Uk Lee ◽

Seon Pil Kim ◽

Kyoung Su Lee ◽

Sang Woo Pak ◽

Eun Kyu Kim

Keyword(s):

Magnetron Sputtering ◽

Band Gap ◽

Flow Rate ◽

Gas Flow ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Gas Flow Rate ◽

Band Gap Modulation

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Microstructure, mechanical and tribological properties of TaCN composite films by reactive magnetron sputtering

Ceramics International ◽

10.1016/j.ceramint.2020.04.205 ◽

2020 ◽

Vol 46 (13) ◽

pp. 20683-20694

Author(s):

Dian Yu ◽

Lihua Yu ◽

Pei Jia ◽

Hongbo Ju ◽

Huang Luo ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Composite Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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Microstructure, mechanical and tribological properties of VCN-Ag composite films by reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2020.126167 ◽

2020 ◽

Vol 399 ◽

pp. 126167

Author(s):

Dian Yu ◽

Lihua Yu ◽

Isaac Asempah ◽

Hongbo Ju ◽

Junhua Xu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Composite Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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The structural, electrical, and optical properties of SnO2 films prepared by reactive magnetron sputtering: Influence of substrate temperature and O2 flow rate

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2020.123129 ◽

2020 ◽

Vol 250 ◽

pp. 123129

Author(s):

Ye Tao ◽

Bailin Zhu ◽

Yuting Yang ◽

Jun Wu ◽

Xinwei Shi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Flow Rate ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Influence Of Substrate

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Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

Lubrication - Tribology, Lubricants and Additives ◽

10.5772/intechopen.73141 ◽

2018 ◽

Author(s):

Mei Wang ◽

Shojiro Miyake

Keyword(s):

Surface Morphology ◽

Magnetron Sputtering ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Multilayer Coatings ◽

Reactive Magnetron

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Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Wear ◽

10.1016/s0043-1648(00)00519-6 ◽

2001 ◽

Vol 248 (1-2) ◽

pp. 55-64 ◽

Author(s):

E. Broitman ◽

N. Hellgren ◽

O. Wänstrand ◽

M.P. Johansson ◽

T. Berlind ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties ◽

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Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering

Materials Science and Engineering B ◽

10.1016/j.mseb.2006.03.036 ◽

2006 ◽

Vol 131 (1-3) ◽

pp. 62-71 ◽

Author(s):

K. Chu ◽

P.W. Shum ◽

Y.G. Shen

Keyword(s):

Solid Solution ◽

Magnetron Sputtering ◽

Tribological Properties ◽

Substitutional Solid Solution ◽

Reactive Magnetron Sputtering ◽

Substrate Bias ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2014.11.130 ◽

2015 ◽

Vol 327 ◽

pp. 68-76 ◽

Author(s):

Wang Shuo ◽

Zhang Kan ◽

An Tao ◽

Hu Chaoquan ◽

Meng Qingnan ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Mechanical And Tribological Properties

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Room temperature ferromagnetism and ferroelectricity behavior of (Cu, Li) co-doped ZnO films deposited by reactive magnetron sputtering

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2009.11.044 ◽

2010 ◽

Vol 312 (7) ◽

pp. 906-909 ◽

Author(s):

C.W. Zou ◽

H.J. Wang ◽

M.L. Yin ◽

M. Li ◽

C.S. Liu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Room Temperature ◽

Room Temperature Ferromagnetism ◽

Reactive Magnetron Sputtering ◽

Zno Films ◽

Reactive Magnetron ◽

Doped Zno ◽

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