Physics of High-Density Radio Frequency Capacitively Coupled Plasma with Various Electrodes and Its Applications
1997 ◽
Vol 52
(13)
◽
pp. 1983-1993
◽
M.M. Rahman
◽
M.W. Blades
Bastien Bruneau
◽
Timo Gans
◽
Deborah O’Connell
◽
Arthur Greb
◽
Erik V. Johnson
◽
...
2003 ◽
Vol 31
(4)
◽
pp. 471-478
◽
2004 ◽
Vol 32
(2)
◽
pp. 601-606
◽
G.V. Paeva
◽
R.P. Dahiya
◽
G.M.W. Kroesen
◽
W.W. Stoffels
1998 ◽
Vol 16
(1)
◽
pp. 294-299
◽
Jun Matsui
◽
Mari Shibata
◽
Nobuhiko Nakano
◽
Toshiaki Makabe
Sorin Anghel
◽
Alpar Simon
◽
Tiberiu Frentiu
◽
Emil A. Cordos
2009 ◽
Vol 16
(3)
◽
pp. 365-370
◽
Song-hua Gao
◽
Ke-sheng Zhou
◽
Li-shi Wen
2012 ◽
Vol 101
(4)
◽
pp. 043705
◽
X. Y. Liu
◽
J. T. Hu
◽
J. H. Liu
◽
Z. L. Xiong
◽
D. W. Liu
◽
...
W. K. Tseng
◽
H. C. Chang
◽
C. Y. Chen
◽
K. C. Leou
2009 ◽
Vol 6
(S1)
◽
pp. S458-S461
◽
Yasunori Ohtsu
◽
Chisa Nakamura
◽
Tatsuya Misawa
◽
Hiroharu Fujita
◽
Morito Akiyama
◽
...