A study of quartz tuning fork resonators in the second flexural mode

1995 ◽  
Vol 42 (3) ◽  
pp. 443-450 ◽  
Author(s):  
E. Momosaki ◽  
T. Kaneko ◽  
T. Shimoda
2011 ◽  
Vol 483 ◽  
pp. 143-147
Author(s):  
Jing Ma ◽  
Jun Xu ◽  
Bo You

In this paper, a low cost quartz tuning fork temperature sensor adopting H-shaped tuning fork resonator to address miniaturization, high resolution and high stability has been designed, developed and tested. The quartz tuning temperature sensor is designed vibrating in flexural mode with a new thermo-sensitive cut. The quartz tuning fork temperature sensor consists of two prongs connected at one end of crystalline quartz plate with thin-film metal electrodes deposited on the faces, which is used to produce vibration in response to alternating voltages and detecting the resonance frequency in the meantime. When an external temperature is change, there is a shift in its natural frequency. Based on this principle, a resonant thermometer is designed. Finite element method is used to analyze the vibratory modes and optimize the structure. The whole structure is 500μm thickness, the length of tuning fork arm is 3076μm and the width of tuning fork arm is 600um, the frequency of tuning fork is about 37kHz with a sensitivity of rough 85 ppm/°C. The experimental results shown that a temperature accuracy of 0.01 °C and a resolution of 0.005 °C within temperature range from 0 °C to 100 °C. All these research are helpful to design satisfactory performance of the sensor for temperature measurement.


2014 ◽  
Vol 530-531 ◽  
pp. 79-82
Author(s):  
Chang Fu Li ◽  
Jing Ma ◽  
Fang He

This paper presents the design, fabrication and characterization of quartz tuning fork temperature sensor which is based on new ZY-cut-quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor has been conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor cause by an external temperature. The sensor prototype was successfully fabricated and calibrated from operating from 0°C to 100°C with sensitivity of 70ppm/°C. Experimental results show the sensor has high thermal sensitivity, good stability and well reproducibility. This work represents high precision and low power temperature sensor using the comprehensive thermal characterization of ZY-cut-quartz tuning fork resonator.


Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 286
Author(s):  
Ashfaq Ali ◽  
Naveed Ullah ◽  
Asim Ahmad Riaz ◽  
Muhammad Zeeshan Zahir ◽  
Zuhaib Ali Khan ◽  
...  

Quartz Tuning Fork (QTF) based sensors are used for Scanning Probe Microscopes (SPM), in particular for near-field scanning optical microscopy. Highly sharp Tungsten (W) tips with larger cone angles and less tip diameter are critical for SPM instead of platinum and iridium (Pt/Ir) tips due to their high-quality factor, conductivity, mechanical stability, durability and production at low cost. Tungsten is chosen for its ease of electrochemical etching, yielding high-aspect ratio, sharp tips with tens of nanometer end diameters, while using simple etching circuits and basic electrolyte chemistry. Moreover, the resolution of the SPM images is observed to be associated with the cone angle of the SPM tip, therefore Atomic-Resolution Imaging is obtained with greater cone angles. Here, the goal is to chemically etch W to the smallest possible tip apex diameters. Tips with greater cone angles are produced by the custom etching procedures, which have proved superior in producing high quality tips. Though various methods are developed for the electrochemical etching of W wire, with a range of applications from scanning tunneling microscopy (SPM) to electron sources of scanning electron microscopes, but the basic chemical etching methods need to be optimized for reproducibility, controlling cone angle and tip sharpness that causes problems for the end users. In this research work, comprehensive experiments are carried out for the production of tips from 0.4 mm tungsten wire by three different electrochemical etching techniques, that is, Alternating Current (AC) etching, Meniscus etching and Direct Current (DC) etching. Consequently, sharp and high cone angle tips are obtained with required properties where the results of the W etching are analyzed, with optical microscope, and then with field emission scanning electron microscopy (FE-SEM). Similarly, effects of varying applied voltages and concentration of NaOH solution with comparison among the produced tips are investigated by measuring their cone angle and tip diameter. Moreover, oxidation and impurities, that is, removal of contamination and etching parameters are also studied in this research work. A method has been tested to minimize the oxidation on the surface and the tips were characterized with scanning electron microscope (SEM).


Nanoscale ◽  
2012 ◽  
Vol 4 (20) ◽  
pp. 6493 ◽  
Author(s):  
Sangmin An ◽  
Corey Stambaugh ◽  
Gunn Kim ◽  
Manhee Lee ◽  
Yonghee Kim ◽  
...  

2013 ◽  
Author(s):  
Sangmin An ◽  
Corey Stambaugh ◽  
Soyoung Kwon ◽  
Kunyoung Lee ◽  
Bongsu Kim ◽  
...  

2012 ◽  
Vol 3 ◽  
pp. 249-259 ◽  
Author(s):  
Zsolt Majzik ◽  
Martin Setvín ◽  
Andreas Bettac ◽  
Albrecht Feltz ◽  
Vladimír Cháb ◽  
...  

We present the results of simultaneous scanning-tunneling and frequency-modulated dynamic atomic force microscopy measurements with a qPlus setup. The qPlus sensor is a purely electrical sensor based on a quartz tuning fork. If both the tunneling current and the force signal are to be measured at the tip, a cross-talk of the tunneling current with the force signal can easily occur. The origin and general features of the capacitive cross-talk will be discussed in detail in this contribution. Furthermore, we describe an experimental setup that improves the level of decoupling between the tunneling-current and the deflection signal. The efficiency of this experimental setup is demonstrated through topography and site-specific force/tunneling-spectroscopy measurements on the Si(111) 7×7 surface. The results show an excellent agreement with previously reported data measured by optical interferometric deflection.


2013 ◽  
Vol 5 (4) ◽  
pp. 1232-1237 ◽  
Author(s):  
Jing Ma ◽  
Jun Xu ◽  
Jinhua Duan ◽  
Haibo Xu

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