In this paper, a stick-slip compensation for the micro-positioning is presented using the
statistical rough surface contact model. As for the micro-positioning structure, PZT (lead(Pb)
zirconia(Zr) Titanate(Ti)) actuator is used to drive the load for precise positioning with its high
resolution incorporating with the PID (Proportional Integral Derivative) control algorithm. Since the
stick-slip characteristics for the micro structures are highly nonlinear and complicated, it is necessary
to incorporate more detailed stick-slip model for the applications involving the high precision motion
control. Thus, the elastic-plastic static friction model is used for the stick-slip compensation
considering the elastic-plastic asperity contact in the rough surfaces statistically. Mathematical model
of the system for the positioning apparatus was derived from the dynamic behaviors of structural parts.
Since the conventional piezoelectric actuator generates the short stroke, a bridge-type flexural hinge
mechanism is introduced to amplify the linear motion range. Using the proposed smart structure,
simulations under the representative positioning motion were conducted to demonstrate the
micro-positioning under the stick-slip friction.