Practical wafer Level Threshold Voltage Stability measurement methodology for the fast evaluation of Flash technology

Author(s):  
Gang Niu ◽  
Wei-Ting Kary Chien ◽  
Jack Chen ◽  
Dennis Zhang ◽  
Susie Yu ◽  
...  
Author(s):  
Sanjay Kumar ◽  
Barjeev Tyagi ◽  
Vishal Kumar ◽  
Sunita Chohan

2019 ◽  
Vol 954 ◽  
pp. 144-150
Author(s):  
Zhi Qiang Bai ◽  
Xiao Yan Tang ◽  
Chao Han ◽  
Yan Jing He ◽  
Qing Wen Song ◽  
...  

Even with SiC power MOSFETs released into the commercial market, the threshold voltage instability caused by near interface states is still an attracting issue, which is a major obstacle to further improving the device performance. In this paper, the effects of temperature storage on the threshold voltage stability of n-channel 4H-SiC VDMOSFET are studied. It is found that the capture of hole traps is dominant during the long-term temperature storage at 425 K, causing a considerable negative shift of threshold voltage. In view of the influence of temperature storage, the positive and negative drift trends of threshold voltage slow down during the gate-bias stress measurement. And the ∆VTH, the difference between the threshold voltages recorded after positive and negative gate-bias stress in the same duration, also grows slowly with the increasing stress duration. Finally, some suggestions for improving the threshold reliability of n-channel SiC VDMOSFETs are presented.


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