Effect of Dissolved Ozone and In-Situ Wafer Cleaning on Pre-Epitaxial Deposition for Next Generation Semiconductor Devices

Author(s):  
Ismail Kashkoush ◽  
Darian Waugh ◽  
Gim Chen
2021 ◽  
Vol 128 ◽  
pp. 102560
Author(s):  
H. Ma ◽  
Z. She ◽  
W.H. Zeng ◽  
Z. Zeng ◽  
M.K. Jing ◽  
...  

Lab on a Chip ◽  
2015 ◽  
Vol 15 (14) ◽  
pp. 3013-3020 ◽  
Author(s):  
Sara Mahshid ◽  
Mohammed Jalal Ahamed ◽  
Daniel Berard ◽  
Susan Amin ◽  
Robert Sladek ◽  
...  

We present a lab-on-a-chip for the next generation of single-cell genomics, performing full-cycle single-cell analysis by demonstrating mega-base pair genomic DNAs in nanochannels extracted in situ.


2014 ◽  
Vol 557 ◽  
pp. 94-100 ◽  
Author(s):  
Shogo Mochizuki ◽  
Rainer Loesing ◽  
Zhengmao Zhu ◽  
Anthony G. Domenicucci ◽  
Philip L. Flaitz ◽  
...  

2018 ◽  
Vol 1 (9) ◽  
pp. 502-507 ◽  
Author(s):  
D. A. Broadway ◽  
N. Dontschuk ◽  
A. Tsai ◽  
S. E. Lillie ◽  
C. T.-K. Lew ◽  
...  

Author(s):  
Matthew Bergin ◽  
Thomas Myles ◽  
Aleksandar Radić ◽  
Christopher Hatchwell ◽  
Sam Lambrick ◽  
...  

Abstract Developing the next generation of scanning helium microscopes requires the fabrication of optical elements with complex internal geometries. We show that resin stereolithography (SLA) 3D printing produces low-cost components with the requisite convoluted structures whilst achieving the required vacuum properties, even without in situ baking. As a case study, a redesigned pinhole plate optical element of an existing scanning helium microscope was fabricated using SLA 3D printing. In comparison to the original machined component, the new optical element minimised the key sources of background signal, in particular multiple scattering and the secondary effusive beam.


2007 ◽  
Vol 556-557 ◽  
pp. 121-124
Author(s):  
Brian H. Ponczak ◽  
James D. Oliver ◽  
Soon Cho ◽  
Gary W. Rubloff

A quadrupole mass spectrometer unit was utilized to accurately detect the chemical species present inside a SiC CVD reactor growth chamber before, during, and after epitaxial deposition. The in-situ mass spectrometer has been able to confirm the presence of silane (SiH4) and propane (C3H8) decomposition products (eg. Si and CH4) that were predicted from chemical modelling, and give insight into specific reaction kinetics. Additionally, the mass spectrometer has positively detected trace amounts of oxygen, which has helped to identify process weaknesses and possible sources of vacuum leaks.


2020 ◽  
Vol 506 ◽  
pp. 144904 ◽  
Author(s):  
You Jin Ji ◽  
Ki Seok Kim ◽  
Ki Hyun Kim ◽  
Albert Rogers Ellingboe ◽  
Geun Young Yeom

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