Auto-Tuning Control of a Switched-Mode Power Converter for Tailored Pulse-Shape Biased Plasma Etching Applications
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1994 ◽
Vol 144
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pp. 635-639
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1996 ◽
Vol 54
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pp. 944-945
1990 ◽
Vol 48
(4)
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pp. 566-567
2011 ◽
Vol 131
(6)
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pp. 858-859
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2010 ◽
Vol 130
(5)
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pp. 646-654
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2020 ◽
Vol 140
(3)
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pp. 140-147
2019 ◽
Vol 14
(2)
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pp. 118