Laser drilling and thermal stress analysis on TSV in 3D IC structure

Author(s):  
Hsiang-Chen Hsu ◽  
Shih-Jeh Wu
2010 ◽  
Vol 46 (10) ◽  
pp. 889-895 ◽  
Author(s):  
Moisés M. Pariona ◽  
Josuel K. Rugenski ◽  
Manuel V. Canté ◽  
José E. Spinelli ◽  
Amauri Garcia

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