A Novel Ring-shaped Extensional Wine-glass Mode RF-MEMS Resonator with High Quality Factors

2021 ◽  
Author(s):  
Zeji Chen ◽  
Wenli Liu ◽  
Quan Yuan ◽  
Yinfang Zhu ◽  
Jinling Yang ◽  
...  
Keyword(s):  
Rf Mems ◽  
Quality Factors ◽  
High Quality ◽  
Mems Resonator ◽  
Wine Glass

A Novel Piezoelectric RF-MEMS Resonator with Enhanced Quality Factor

2022 ◽  
Author(s):  
JINCHAO LI ◽  
Zeji Chen ◽  
Wenli Liu ◽  
Jinling Yang ◽  
Yinfang Zhu ◽  
...  
Keyword(s):  
Elastic Waves ◽  
High Frequency ◽  
Rf Mems ◽  
Comprehensive Analysis ◽  
Quality Factors ◽  
Piezoelectric Resonator ◽  
Front End ◽  
Rf Front End ◽  
Mems Resonator ◽  
Compact Size

Abstract This work presents a novel ultra-high frequency (UHF) Lamb mode Aluminum Nitride (AlN) piezoelectric resonator with enhanced quality factors (Q). With slots introduced in the vicinity of the tether support end, the elastic waves leaking from the tether sidewalls can be reflected, which effectively reduces the anchor loss while retaining size compactness and mechanical robustness. Comprehensive analysis was carried out to provide helpful guidance for obtaining optimal slot designs. For various resonators with frequencies ranging from 630 MHz to 1.97 GHz, promising Q enhancements up to 2 times have all been achieved. The 1.97 GHz resonator implemented excellent f × Q product up to 6.72 × 1012 and low motional resistance down to 340 Ω, which is one of the highest performances among the reported devices. The devices with enhanced Q values as well as compact size could have potential application in advanced RF front end transceivers.

A Novel Lamé Mode RF-MEMS Resonator with High Quality Factor

2021 ◽  
pp. 106484
Author(s):  
Zeji Chen ◽  
Tianyun Wang ◽  
Qianqian Jia ◽  
Jinling Yang ◽  
Quan Yuan ◽  
...  
Keyword(s):  
Quality Factor ◽  
Rf Mems ◽  
High Quality Factor ◽  
High Quality ◽  
Mems Resonator

scholarly journals Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

Nanomaterials ◽  
2019 ◽  
Vol 9 (9) ◽  
pp. 1218 ◽  
Author(s):  
Jianhao Zhang ◽  
Zhiwei Fang ◽  
Jintian Lin ◽  
Junxia Zhou ◽  
Min Wang ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Femtosecond Laser ◽  
Wedge Angle ◽  
Quality Factors ◽  
High Quality ◽  
Surface Smoothness ◽  
High Q ◽  
Q Factors

We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 107 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

Unidirectional reflectionlessness and nonreciprocal perfect absorption in optical waveguide system based on phase coupling between two photonic crystal cavities

2018 ◽  
Vol 27 (01) ◽  
pp. 1850004 ◽  
Author(s):  
Shu Jing Liu ◽  
Cong Zhang ◽  
Ruiping Bai ◽  
Xintong Gu ◽  
Hong Da Yin ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Optical Waveguide ◽  
Quality Factors ◽  
Phase Coupling ◽  
High Quality ◽  
Perfect Absorption ◽  
Photonic Crystal Cavities ◽  
Exceptional Points ◽  
Waveguide System ◽  
Distance Formula

We demonstrate the unidirectional reflectionlessness at exceptional points (EPs) and nonreciprocal perfect absorption near EPs based on phase coupling between two photonic crystal cavities (PCCs) in optical waveguide. In our scheme, when distance [Formula: see text][Formula: see text]nm ([Formula: see text][Formula: see text]nm), the reflectivities for forward and backward (backward and forward) directions are closed to [Formula: see text] and [Formula: see text] ([Formula: see text] and [Formula: see text]), respectively, and absorptances of the nonreciprocal perfect absorptions for forward and backward directions are [Formula: see text] and [Formula: see text] with the high quality factors of [Formula: see text] and [Formula: see text], respectively.

Electrofluidic Assembly of Nanoelectromechanical Systems

2001 ◽  
Vol 687 ◽  
Author(s):  
Stephane Evoy ◽  
Ben Hailer ◽  
Martin Duemling ◽  
Benjamin R. Martin ◽  
Thomas E. Mallouk ◽  
...  
Keyword(s):  
Nanoelectromechanical Systems ◽  
Quality Factors ◽  
Top Down ◽  
High Quality ◽  
Resonant Frequencies ◽  
Surface Machining ◽  
Sensor Applications ◽  
Surface Assembly ◽  
Manufacturing Technologies ◽  
20 Nm

AbstractRecent advances in surface nanomachining have allowed the fabrication of mechanical structures with dimensions reaching 20 nm, and resonant frequencies in the 100s of MHz. Structural issues prevent the “top-down” surface machining of high-quality NEMS resonators. Such systems are alternatively to be bestowed by “bottom-up” manufacturing technologies. We report the surface assembly of RF-range NEMS. Using electrofluidic assembly, we have successfully positioned Rh mechanical beams onto specific sites of a silicon circuit. With diameters as small as 250 nm and lengths varying from 2 to 3 [.proportional]m, preliminary results show mechanical resonances ranging from 5 MHz to 80 MHz, and quality factors reaching 500. We also report the development of nanostructured NEMS for sensor applications, and present strategies for their deployment in integrative nanosystems.

426 Development of RF-MEMS Resonator with MHz Range

2008 ◽  
Vol 2008.8 (0) ◽  
pp. 153-154
Author(s):  
Naoki MATSUZUKA ◽  
Yoshitada ISONO
Keyword(s):  
Rf Mems ◽  
Mems Resonator
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