Electrofluidic Assembly of Nanoelectromechanical Systems

2001 ◽  
Vol 687 ◽  
Author(s):  
Stephane Evoy ◽  
Ben Hailer ◽  
Martin Duemling ◽  
Benjamin R. Martin ◽  
Thomas E. Mallouk ◽  
...  
Keyword(s):  
Nanoelectromechanical Systems ◽  
Quality Factors ◽  
Top Down ◽  
High Quality ◽  
Resonant Frequencies ◽  
Surface Machining ◽  
Sensor Applications ◽  
Surface Assembly ◽  
Manufacturing Technologies ◽  
20 Nm

AbstractRecent advances in surface nanomachining have allowed the fabrication of mechanical structures with dimensions reaching 20 nm, and resonant frequencies in the 100s of MHz. Structural issues prevent the “top-down” surface machining of high-quality NEMS resonators. Such systems are alternatively to be bestowed by “bottom-up” manufacturing technologies. We report the surface assembly of RF-range NEMS. Using electrofluidic assembly, we have successfully positioned Rh mechanical beams onto specific sites of a silicon circuit. With diameters as small as 250 nm and lengths varying from 2 to 3 [.proportional]m, preliminary results show mechanical resonances ranging from 5 MHz to 80 MHz, and quality factors reaching 500. We also report the development of nanostructured NEMS for sensor applications, and present strategies for their deployment in integrative nanosystems.

Dual-Band Bandpass Filter Optimized for High Q-Factor

2021 ◽  
Vol 36 (4) ◽  
pp. 398-410
Author(s):  
Walid Fahmy ◽  
Asmaa Farahat ◽  
Khalid Hussein ◽  
Abd-El-Hadi Ammar
Keyword(s):  
Quality Factor ◽  
Bandpass Filter ◽  
High Quality Factor ◽  
Dual Band ◽  
Optimized Design ◽  
Hybrid Architecture ◽  
Quality Factors ◽  
High Quality ◽  
Resonant Frequencies ◽  
Simulation Results

High quality factor bandpass filters based on a number of cascaded resonators of dual-resonance mechanism are proposed in the present paper. Each resonator is constructed as two overlapped coplanar waveguide (CPW) resonant structures. The cascaded resonators mediate microwave coupling between two isolated corner-shaped CPW feeders only at the resonant frequencies leading to a bandpass filter of high quality factor. The two resonant frequencies and the separation between them can be fine-tuned by the dimensions of the structure. The effects of the dimensional parameters of the resonator and the feeding CPW regions on the resonant frequencies and the performance of the bandpass filter are investigated. The effect of the loss tangent of the dielectric substrate material on the quality factors at the two resonant frequencies is studied. Three prototypes of the proposed filter are fabricated and experimentally studied for more understanding of the underlying physical principles of operation and for verifying some of the simulation results. The experimental results show good agreement when compared with the corresponding simulation results. It is shown that, at low enough absolute temperature, the proposed structure can operate as superconducting microwave resonator when made from the appropriate materials. Also, it is shown that an optimized design of the proposed bandpass filter, based on superconducting CPWR structure, can achieve quality factors high enough to form a quantum data bus for hybrid architecture of quantum information systems.

scholarly journals Sensing applications of micro- and nanoelectromechanical resonators

2007 ◽  
Vol 221 (2) ◽  
pp. 59-65 ◽  
Author(s):  
F Niebelschütz ◽  
V Cimalla ◽  
K Brückner ◽  
R Stephan ◽  
K Tonisch ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminium Nitride ◽  
Nanoelectromechanical Systems ◽  
Silicon Substrates ◽  
Mass Loading ◽  
Quality Factors ◽  
Ambient Conditions ◽  
Resonant Frequencies ◽  
Sensing Applications ◽  
Active Layers

The sensitivity of micro- and nanoscale resonator beams for sensing applications in ambient conditions was investigated. Micro-electromechanical (MEMS) and nanoelectromechanical systems (NEMS) were realized using silicon carbide (SiC) and polycrystalline aluminium nitride (AlN) as active layers on silicon substrates. Resonant frequencies and quality factors in vacuum as well as in air were measured. The sensitivity behaviour under ambient conditions with a mass loading in the range of picogram (pg) was verified and measurements with biological mass loading were performed. In addition, the sensitivity to pressure variations was analysed.

scholarly journals Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

2020 ◽  
Vol 6 (1) ◽  
Author(s):  
Xuge Fan ◽  
Anderson D. Smith ◽  
Fredrik Forsberg ◽  
Stefan Wagner ◽  
Stephan Schröder ◽  
...  
Keyword(s):  
Large Scale ◽  
Volume Ratio ◽  
Nanoelectromechanical Systems ◽  
Quality Factors ◽  
Atomic Force ◽  
Resonance Frequencies ◽  
Manufacturing Technologies ◽  
High Yields ◽  
Large Scale Manufacture ◽  
Graphene Membranes

AbstractGraphene’s unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 µm to 110 µm, and suspended proof masses consisting of solid silicon cubes that are from 5 µm × 5 µm × 16.4 µm to 100 µm × 100 µm × 16.4 µm in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were >90%, with >70% of the graphene membranes having >90% graphene area without visible defects. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The graphene membranes with suspended proof masses were extremely robust, and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to ~7000 nN. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.

Femtosecond ultrafast pulse generation with high-quality 2H-TaS2 nanosheets via top-down empirical approach

Nanoscale ◽  
2021 ◽  
Author(s):  
Qiang Yu ◽  
Shun Wang ◽  
Yan Zhang ◽  
Zhuo Dong ◽  
Haiqin Deng ◽  
...  
Keyword(s):  
Transition Metal ◽  
Phase Diagrams ◽  
Carrier Concentration ◽  
Layered Structure ◽  
Pulse Generation ◽  
Transition Metal Dichalcogenide ◽  
Top Down ◽  
High Quality ◽  
Rich Phase ◽  
Ultrafast Pulse Generation

Tantalum disulfide (TaS2), an emerging group VB transition metal dichalcogenide, with unique layered structure, rich phase diagrams, semimetallic behavior, higher carrier concentration and mobility is emerging as a prototype for...

Characterization of a Non-Interdigitated Comb Drive

2018 ◽  
Author(s):  
Mary Gopanchuk ◽  
Mohamed Arabi ◽  
N. Nelson-Fitzpatrick ◽  
Majed S. Al-Ghamdi ◽  
Eihab Abdel-Rahman ◽  
...  
Keyword(s):  
Quality Factor ◽  
Fundamental Frequency ◽  
High Quality Factor ◽  
Silicon On Insulator ◽  
Comb Drive ◽  
High Quality ◽  
Sensor Applications ◽  
Fabrication And Characterization

This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.

scholarly journals A Review on Additive Manufacturing of Micromixing Devices

Micromachines ◽  
2021 ◽  
Vol 13 (1) ◽  
pp. 73
Author(s):  
Marina Garcia-Cardosa ◽  
Francisco-Javier Granados-Ortiz ◽  
Joaquín Ortega-Casanova
Keyword(s):  
Life Cycle ◽  
Additive Manufacturing ◽  
High Performance ◽  
Future Prospects ◽  
High Quality ◽  
Printing Technology ◽  
Wide Range ◽  
The Moment ◽  
Manufacturing Technologies

In recent years, additive manufacturing has gained importance in a wide range of research applications such as medicine, biotechnology, engineering, etc. It has become one of the most innovative and high-performance manufacturing technologies of the moment. This review aims to show and discuss the characteristics of different existing additive manufacturing technologies for the construction of micromixers, which are devices used to mix two or more fluids at microscale. The present manuscript discusses all the choices to be made throughout the printing life cycle of a micromixer in order to achieve a high-quality microdevice. Resolution, precision, materials, and price, amongst other relevant characteristics, are discussed and reviewed in detail for each printing technology. Key information, suggestions, and future prospects are provided for manufacturing of micromixing machines based on the results from this review.

scholarly journals Top-down Fabrication of Silicon Nanowires Using Thermal Oxidation and Wet Etching for Inertial Sensor Applications

2018 ◽  
Vol 30 (8) ◽  
pp. 1891 ◽  
Author(s):  
Seohyeong Jang ◽  
Hun Lee ◽  
Joon Yoon Shin ◽  
Hyung Jung Yoo ◽  
Dong-il "Dan" Cho
Keyword(s):  
Thermal Oxidation ◽  
Silicon Nanowires ◽  
Inertial Sensor ◽  
Wet Etching ◽  
Top Down ◽  
Sensor Applications

scholarly journals Practices of Media Sport: Everyday Experience and Audience Innovation

2015 ◽  
Vol 155 (1) ◽  
pp. 89-98 ◽  
Author(s):  
James Meese ◽  
Aneta Podkalicka
Keyword(s):  
Technological Innovation ◽  
High Tech ◽  
Media Consumption ◽  
Top Down ◽  
Everyday Experience ◽  
High Quality ◽  
Sports Media ◽  
Regulatory Frameworks ◽  
Complementary Strategy ◽  
Telecommunications Companies

Media sport has a long history as a significant site of media innovation, and existing work in media and cultural studies has explored how media sport, technological innovation and regulatory frameworks interact. However, this work often focuses on how major actors such as broadcasting organisations, sporting bodies and telecommunications companies mediate sport. As a complementary strategy to this ‘top-down’ analysis, we approach media sport through the lens of practice, which allows us to understand everyday forms of engagement with, and consumption of, media sport in a clearer fashion. The article analyses existing policy discourses and social commentaries centred on the targeted ‘high-quality’ or ‘high-tech technological’ innovation, and argues that users of sports media are also motivated by series of cultural rewards and varied tradeoffs that do not map neatly onto industrial categories of quality or media consumption trends.

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