Oxide breakdown decrease by oxide growth projection of implantation-caused stacking faults - a characterization case study using atomic force microscopy

2005 ◽  
Author(s):  
P. Jacob ◽  
K. Hoeppner
Keyword(s):  
Atomic Force Microscopy ◽  
Stacking Faults ◽  
Oxide Growth ◽  
Oxide Breakdown ◽  
Force Microscopy ◽  
Atomic Force ◽  
Growth Projection

Die-Level Scanning Capacitance Microscopy Fault Isolation on SOI Fin-FET Devices for Advanced Semiconductor Nodes

2018 ◽  
Author(s):  
Lucile C. Teague Sheridan ◽  
Tanya Schaeffer ◽  
Yuting Wei ◽  
Satish Kodali ◽  
Chong Khiam Oh
Keyword(s):  
Atomic Force Microscopy ◽  
Failure Analysis ◽  
Fault Isolation ◽  
Scanning Capacitance Microscopy ◽  
Force Microscopy ◽  
Atomic Force

Abstract It is widely acknowledged that Atomic force microscopy (AFM) methods such as conductive probe AFM (CAFM) and Scanning Capacitance Microscopy (SCM) are valuable tools for semiconductor failure analysis. One of the main advantages of these techniques is the ability to provide localized, die-level fault isolation over an area of several microns much faster than conventional nanoprobing methods. SCM, has advantages over CAFM in that it is not limited to bulk technologies and can be utilized for fault isolation on SOI-based technologies. Herein, we present a case-study of SCM die-level fault isolation on SOI-based FinFET technology at the 14nm node.

GROWTH MODES AND DEFECTS OF MANGANESE MERCURY THIOCYANATE CRYSTALS OBSERVED BY AFM

2009 ◽  
Vol 16 (01) ◽  
pp. 19-22
Author(s):  
Y. L. GENG ◽  
Z. H. SUN
Keyword(s):  
Atomic Force Microscopy ◽  
Screw Dislocation ◽  
Stacking Faults ◽  
Nucleation And Growth ◽  
Controlled Growth ◽  
Growth Mechanisms ◽  
Force Microscopy ◽  
Atomic Force ◽  
Growth Modes ◽  
Nucleation Growth

Growth mechanisms and defects formation of the manganese mercury thiocyanate (MMTC) crystal have been investigated by atomic force microscopy (AFM). Both screw dislocation controlled growth and 2D nucleation growth occur on the {110} faces. Stacking faults are observed among dislocation hillocks and the formation of them probably results from the different crystallization orientations of different spirals. Hollow channels are found around the nucleation islands and the formation of them is due to the instability of the interface generated by the rapid nucleation and growth speeds.

Indentation modulus and hardness of viscoelastic thin films by atomic force microscopy: A case study

2009 ◽  
Vol 109 (12) ◽  
pp. 1417-1427 ◽  
Author(s):  
D. Passeri ◽  
A. Bettucci ◽  
A. Biagioni ◽  
M. Rossi ◽  
A. Alippi ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Force Microscopy ◽  
Indentation Modulus ◽  
Force Microscopy ◽  
Atomic Force

Imaging polycrystalline and smoke MgO surfaces with atomic force microscopy: a case study of high resolution image on a polycrystalline oxide

2004 ◽  
Vol 570 (3) ◽  
pp. 155-166 ◽  
Author(s):  
Domenica Scarano ◽  
Serena Bertarione ◽  
Federico Cesano ◽  
Giuseppe Spoto ◽  
Adriano Zecchina
Keyword(s):  
Atomic Force Microscopy ◽  
High Resolution ◽  
Force Microscopy ◽  
Resolution Image ◽  
High Resolution Image ◽  
Atomic Force

scholarly journals Swelling of individual cellulose nanofibrils in water, role of crystallinity: an AFM study

Cellulose ◽  
2020 ◽  
Author(s):  
Vegar Ottesen ◽  
Kristin Syverud
Keyword(s):  
Atomic Force Microscopy ◽  
Cellulose Nanofibrils ◽  
Platinum Nanowires ◽  
Force Microscopy ◽  
Atomic Force ◽  
Water Swelling ◽  
Fibril Diameter

Abstract Atomic force microscopy (AFM) can be used to quantitatively study nanomaterials in different media, e.g. vacuum, air, or submerged in a liquid. A technique was developed to study swelling of individual cellulose nanofibrils (CNFs) using AFM. As a case study, CNFs with different degrees of crystallinity (DoC) were examined for swellability going from dry to wet (submerged in de-ionized water). Swelling was found to depend on DoC, but no significant correlation between fibril diameter and swellability was seen. Upon introduction of de-ionized water high DoC samples ($$65\pm 2\%$$ 65 ± 2 % ) were found to have a diameter increase of 34% on average, whereas low DoC ($$44\pm 2\%$$ 44 ± 2 % ) were found to have a diameter increase of 44% on average. A tested control, consisting of platinum nanowires on silisium, did not swell. Graphic abstract

In situ atomic force microscopy: the case study of graphite immersed in aqueous NaOH electrolyte

2020 ◽  
Vol 135 (3) ◽  
Author(s):  
Gianlorenzo Bussetti ◽  
Marcello Campione ◽  
Alberto Bossi ◽  
Claudio Goletti ◽  
Lamberto Duò ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force

scholarly journals Topographic characterization of zirconia-based ceramics by atomic force microscopy: A case study on different laser irradiations

2020 ◽  
Vol 831 ◽  
pp. 154763 ◽  
Author(s):  
Mehdi Fattahi ◽  
Negin Beryani Nezafat ◽  
Ştefan Ţălu ◽  
Shahram Solaymani ◽  
Mahmood Ghoranneviss ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force

Properties of 3C-SiC Grown by Sublimation Epitaxy on Different Type of Substrates

2010 ◽  
Vol 645-648 ◽  
pp. 183-186 ◽  
Author(s):  
Milena Beshkova ◽  
Jean Lorenzzi ◽  
Nikoletta Jegenyes ◽  
Jens Birch ◽  
Mikael Syväjärvi ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Stacking Faults ◽  
Reciprocal Space ◽  
Force Microscopy ◽  
Atomic Force ◽  
Different Types

3C-SiC layers have been grown by using sublimation epitaxy at a temperature of 2000°C, on different types of on-axis 6H-SiC(0001) substrates. The influence of the type of substrate on the morphology of the layers investigated by Atomic Force Microscopy (AFM) is discussed. Stacking faults are studied by reciprocal space map (RSM) which shows that double positions domains exists.

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