Numerical modeling of silicon etching in CF/sub 4//O/sub 2/ plasma-chemical system

Author(s):  
Yu.N. Grigoryev ◽  
A.G. Gorobchuk
2020 ◽  
Author(s):  
Thomas MacDonald ◽  
Timothy Schmidt ◽  
Jonathon Beves

A chemical system is proposed that is capable of amplifying small optical inputs into large changes in internal composition, based on a feedback interaction between switchable fluorescence and visible-light photoswitching. This system would demonstrate bifurcating reaction kinetics under irradiation and reach one of two stable photostationary states depending on the initial composition of the system. This behavior would allow the system to act as a chemical realization of the flip-flop circuit, the fundamental element in sequential logic and binary memory storage. We use detailed numerical modeling to demonstrate the feasibility of the proposed behavior based on known molecular phenomena, and comment on some of the conditions required to realize this system.


Author(s):  
K V Rudenko ◽  
A V Miakonkih ◽  
A E Rogojin ◽  
S V Bogdanov ◽  
V G Sidorov ◽  
...  

The efficiency of ethylene impurities decomposition in barrierless plasma-chemical system during artificial injection into the air of a sea container has been studied. The experimental study was performed at the air temperature 5oC in container volume 65 m3. The initial level of ozone in the air was 100 ppb. This concentration is below concentration which audible to humans. It has been established that the use of a carbon filter after a plasma chemical system allows to maintain the ozone content in the air at an acceptable level (in terms of human health and food storage). During 24 hours the ethylene concentration increases until an equilibrium concentration is reached. After the plasma chemical rector was switched on, the ethylene concentration in the container began to decrease due to decomposition in the low-temperature plasma and interaction with ozone until new equilibrium concentration was reached. The ozone concentration after plasma chemical reactor was switched to begin increased. After 1 hour, the new minimum equilibrium ethylene and ozone concentration was established. The decrease in concentration occurred exponentially and reached a new equilibrium concentration above zero, which is consistent with the theory. The increase in ozone concentration occurs by about 20-25%. It has been shown that using plasma chemical system based on barrierless plasma chemical reactors can reduce the ethylene concentration by up to 10 times, even for low concentrations of ethylene in the air.


2020 ◽  
Author(s):  
Thomas MacDonald ◽  
Timothy Schmidt ◽  
Jonathon Beves

A chemical system is proposed that is capable of amplifying small optical inputs into large changes in internal composition, based on a feedback interaction between switchable fluorescence and visible-light photoswitching. This system would demonstrate bifurcating reaction kinetics under irradiation and reach one of two stable photostationary states depending on the initial composition of the system. This behavior would allow the system to act as a chemical realization of the flip-flop circuit, the fundamental element in sequential logic and binary memory storage. We use detailed numerical modeling to demonstrate the feasibility of the proposed behavior based on known molecular phenomena, and comment on some of the conditions required to realize this system.


2018 ◽  
Vol 144 ◽  
pp. 1-7 ◽  
Author(s):  
Andrzej G. Chmielewski ◽  
Ewa Zwolińska ◽  
Janusz Licki ◽  
Yongxia Sun ◽  
Zbigniew Zimek ◽  
...  

1995 ◽  
Vol 74-75 ◽  
pp. 212-214 ◽  
Author(s):  
M. Šícha ◽  
L. Soukup ◽  
L. Jastrabík ◽  
M. Novák ◽  
M. Tichý

1994 ◽  
Vol 34 (6) ◽  
pp. 765-772 ◽  
Author(s):  
M. Tichý ◽  
M. Šicha ◽  
L. Bárdos ◽  
L. Soukup ◽  
L. Jastrabík ◽  
...  

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