A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology

This paper introduces a prototype of the inertial sensor based on electromagnetic suspension. By analyzing and simulating the change of the magnetic field, the dynamic equation of proof mass has been deduced. The device has the characteristics of a high-frequency accelerometer and a vibration frequency sensor, and the horizontal and vertical frequency ranges of the magnetic suspension acceleration measurement system are 50–500 Hz and 35–650 Hz, and the acceleration measurement ranges are ±3.3 m/s 2 and ±10 m/s 2 , respectively. Compared with the MPU6050 accelerometer, this measurement method has higher sensitivity and retains more vibration acceleration information of the measured object. This paper provides a new idea for the design of the acceleration sensor.

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A Micromachined Earth Sensor Based on Measuring the Gravity Gradient Torque

Volume 12: Micro and Nano Systems, Parts A and B ◽

10.1115/imece2009-12762 ◽

2009 ◽

Author(s):

K. Ghose ◽

H. R. Shea

Keyword(s):

Proof Mass ◽

Inertial Sensor ◽

Low Earth Orbit ◽

Relative Orientation ◽

Gravity Gradient ◽

Earth Orbit ◽

Optical Access ◽

The Earth ◽

Ir Emission

We present the fabrication and testing of a novel MEMS inertial sensor that directly measures the gravity gradient in low Earth orbit in order to sense the relative orientation of a satellite with respect to the Earth. Instead of the current Earth sensing methods that determine the Earth vector by sensing the Earth’s IR emission, we present a much lighter and more compact MEMS-based approach that determine the Earth vector by measuring the Gravity Gradient Torque on an elongated silicon proof mass. Current Earth sensors require optical access on multiple faces of the satellite. This MEMS-based approach does not require optical access.

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Design and Simulation of MEMS Based Tuning Fork Micro-Gyroscope

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.110-116.5036 ◽

2011 ◽

Vol 110-116 ◽

pp. 5036-5043

Author(s):

Suthin Khankhua ◽

Muhammad Waseem Ashraf ◽

Nitin Afzulpurkar ◽

Shahzadi Tayyaba ◽

Chumnarn Punyasai

Keyword(s):

Vibration Amplitude ◽

Tuning Fork ◽

Proof Mass ◽

Inertial Sensor ◽

Sense Mode ◽

Small Vibration ◽

Common Mode ◽

Microelectromechanical System ◽

Proposed Model ◽

Simulation Results

In this paper, design, analysis and simulation of microelectromechanical system (MEMS) based inertial sensor type of tuning fork micro gyroscope have been presented. CoventorWare has been used for design and simulation. The proposed design has improved the performances and structure for small vibration amplitude to minimize the mechanical crosstalk. Simulation results show that the capacitance in sense mode, which is detected by variable-gap capacitors, is equal to 2.68 pF in each side of sense mode. Oscillations in drive and sense electrodes with 1-DOF and proof mass with 2-DOF ensure that the proposed model has no common mode that causes mechanical crosstalk.

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