Correction of SEM image distortion based on non-equidistant GM(1,1) model

Author(s):  
Xi Chen ◽  
Hua Han ◽  
Qi-Wei Xie ◽  
Li-Jun Shen
Keyword(s):  
2012 ◽  
Author(s):  
Osamu Inoue ◽  
Takahiro Kawasaki ◽  
Hiroki Kawada

2011 ◽  
Author(s):  
Osamu Inoue ◽  
Takahiro Kawasaki ◽  
Miyako Matsui ◽  
Hiroki Kawada

Author(s):  
Y. Kokubo ◽  
W. H. Hardy ◽  
J. Dance ◽  
K. Jones

A color coded digital image processing is accomplished by using JEM100CX TEM SCAN and ORTEC’s LSI-11 computer based multi-channel analyzer (EEDS-II-System III) for image analysis and display. Color coding of the recorded image enables enhanced visualization of the image using mathematical techniques such as compression, gray scale expansion, gamma-processing, filtering, etc., without subjecting the sample to further electron beam irradiation once images have been stored in the memory.The powerful combination between a scanning electron microscope and computer is starting to be widely used 1) - 4) for the purpose of image processing and particle analysis. Especially, in scanning electron microscopy it is possible to get all information resulting from the interactions between the electron beam and specimen materials, by using different detectors for signals such as secondary electron, backscattered electrons, elastic scattered electrons, inelastic scattered electrons, un-scattered electrons, X-rays, etc., each of which contains specific information arising from their physical origin, study of a wide range of effects becomes possible.


Author(s):  
D. C. Joy ◽  
R. D. Bunn

The information available from an SEM image is limited both by the inherent signal to noise ratio that characterizes the image and as a result of the transformations that it may undergo as it is passed through the amplifying circuits of the instrument. In applications such as Critical Dimension Metrology it is necessary to be able to quantify these limitations in order to be able to assess the likely precision of any measurement made with the microscope.The information capacity of an SEM signal, defined as the minimum number of bits needed to encode the output signal, depends on the signal to noise ratio of the image - which in turn depends on the probe size and source brightness and acquisition time per pixel - and on the efficiency of the specimen in producing the signal that is being observed. A detailed analysis of the secondary electron case shows that the information capacity C (bits/pixel) of the SEM signal channel could be written as :


Author(s):  
L. S. Chumbley ◽  
M. Meyer ◽  
K. Fredrickson ◽  
F.C. Laabs

The development of a scanning electron microscope (SEM) suitable for instructional purposes has created a large number of outreach opportunities for the Materials Science and Engineering (MSE) Department at Iowa State University. Several collaborative efforts are presently underway with local schools and the Department of Curriculum and Instruction (C&I) at ISU to bring SEM technology into the classroom in a near live-time, interactive manner. The SEM laboratory is shown in Figure 1.Interactions between the laboratory and the classroom use inexpensive digital cameras and shareware called CU-SeeMe, Figure 2. Developed by Cornell University and available over the internet, CUSeeMe provides inexpensive video conferencing capabilities. The software allows video and audio signals from Quikcam™ cameras to be sent and received between computers. A reflector site has been established in the MSE department that allows eight different computers to be interconnected simultaneously. This arrangement allows us to demonstrate SEM principles in the classroom. An Apple Macintosh has been configured to allow the SEM image to be seen using CU-SeeMe.


Author(s):  
M. T. Postek ◽  
A. E. Vladar

Fully automated or semi-automated scanning electron microscopes (SEM) are now commonly used in semiconductor production and other forms of manufacturing. The industry requires that an automated instrument must be routinely capable of 5 nm resolution (or better) at 1.0 kV accelerating voltage for the measurement of nominal 0.25-0.35 micrometer semiconductor critical dimensions. Testing and proving that the instrument is performing at this level on a day-by-day basis is an industry need and concern which has been the object of a study at NIST and the fundamentals and results are discussed in this paper.In scanning electron microscopy, two of the most important instrument parameters are the size and shape of the primary electron beam and any image taken in a scanning electron microscope is the result of the sample and electron probe interaction. The low frequency changes in the video signal, collected from the sample, contains information about the larger features and the high frequency changes carry information of finer details. The sharper the image, the larger the number of high frequency components making up that image. Fast Fourier Transform (FFT) analysis of an SEM image can be employed to provide qualitiative and ultimately quantitative information regarding the SEM image quality.


2020 ◽  
Vol 64 (1) ◽  
pp. 10505-1-10505-16
Author(s):  
Yin Zhang ◽  
Xuehan Bai ◽  
Junhua Yan ◽  
Yongqi Xiao ◽  
C. R. Chatwin ◽  
...  

Abstract A new blind image quality assessment method called No-Reference Image Quality Assessment Based on Multi-Order Gradients Statistics is proposed, which is aimed at solving the problem that the existing no-reference image quality assessment methods cannot determine the type of image distortion and that the quality evaluation has poor robustness for different types of distortion. In this article, an 18-dimensional image feature vector is constructed from gradient magnitude features, relative gradient orientation features, and relative gradient magnitude features over two scales and three orders on the basis of the relationship between multi-order gradient statistics and the type and degree of image distortion. The feature matrix and distortion types of known distorted images are used to train an AdaBoost_BP neural network to determine the image distortion type; the feature matrix and subjective scores of known distorted images are used to train an AdaBoost_BP neural network to determine the image distortion degree. A series of comparative experiments were carried out using Laboratory of Image and Video Engineering (LIVE), LIVE Multiply Distorted Image Quality, Tampere Image, and Optics Remote Sensing Image databases. Experimental results show that the proposed method has high distortion type judgment accuracy and that the quality score shows good subjective consistency and robustness for all types of distortion. The performance of the proposed method is not constricted to a particular database, and the proposed method has high operational efficiency.


Author(s):  
Shanmuganathan S. ◽  
Nigma S. ◽  
Anbarasan B. ◽  
Harika B.

Nanoparticulate Carriers which is biodegradable, biocompatible and bio adhesive have significant feasible applications for administration of therapeutic molecules. The present study was aimed to formulate and optimise Capecitabine loaded Chitosan-Fe3O4 Nanoparticles and to study the in-vitro evaluation by sigma dialysis method. Capecitabine loaded chitosan – Fe3O4 nanoparticles batches with different ratios of drug: polymer (1:1, 1:2, 1:3, 1:4, 1:5, 1:6) were prepared by ionic gelation method. Increase in polymer concentration increases the nanoparticle drug content. Entrapment efficiency was 60.12% with drug to polymer ratio F3 (1:3). In-vitro release was found to be 65.20% for 12 hrs. Capecitabine from chitosanFe3O4 nanoparticles SEM image reveals discrete spherical structure and particles with size range of 100-500nm. FTIR studies represent the functional groups present with no characteristics change in formulations. Samples stored at refrigerator conditions showed better stability compared with samples kept at other conditions during 8 weeks of storage.


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