High reliability InGaZnO TFT by inductively coupled plasma sputtering system

Author(s):  
Daisuke Matsuo ◽  
Ikeda Takuya ◽  
Shigeaki Kishida ◽  
Yoshitaka Setogucti ◽  
Yasunori Andoh ◽  
...  
2017 ◽  
Vol 6 (1) ◽  
pp. 121-133 ◽  
Author(s):  
Gerry Hamdana ◽  
Maik Bertke ◽  
Lutz Doering ◽  
Thomas Frank ◽  
Uwe Brand ◽  
...  

Abstract. A developed transferable micro force sensor was evaluated by comparing its response with an industrially manufactured device. In order to pre-identify sensor properties, three-dimensional (3-D) sensor models were simulated with a vertically applied force up to 1000 µN. Then, controllable batch fabrication was performed by alternately utilizing inductively coupled plasma (ICP) reactive ion etching (RIE) and photolithography. The assessments of sensor performance were based on sensor linearity, stiffness and sensitivity. Analysis of the device properties revealed that combination of a modest stiffness value (i.e., (8.19 ± 0.07) N m−1) and high sensitivity (i.e., (15.34 ± 0.14) V N−1) at different probing position can be realized using a meander-spring configuration. Furthermore, lower noise voltage is obtained using a double-layer silicon on insulator (DL-SOI) as basic material to ensure high reliability and an excellent performance of the sensor.


2002 ◽  
Vol 81 (15) ◽  
pp. 2821-2823 ◽  
Author(s):  
Takamaro Kikkawa ◽  
Naonori Fujiwara ◽  
Hiroshi Yamada ◽  
Seiichi Miyazaki ◽  
Fumitaka Nishiyama ◽  
...  

Materials ◽  
2019 ◽  
Vol 12 (15) ◽  
pp. 2426 ◽  
Author(s):  
Mirko Riede ◽  
Matthias Knoll ◽  
Christoph Wilsnack ◽  
Samira Gruber ◽  
Alba Alegre Cubillo ◽  
...  

Recently, additive manufacturing (AM) by laser metal deposition (LMD) has become a key technology for fabricating highly complex parts without any support structures. Compared to the well-known powder bed fusion process, LMD enhances manufacturing possibilities to overcome AM-specific challenges such as process inherent porosity, minor build rates, and limited part size. Moreover, the advantages aforementioned combined with conventional machining enable novel manufacturing approaches in various fields of applications. Within this contribution, the additive manufacturing of filigree flexure pivots using 316L-Si by means of LMD with powder is presented. Frictionless flexure pivot bearings are used in space mechanisms that require high reliability, accuracy, and technical cleanliness. As a contribution to part qualification, the manufacturing process, powder material, and fabricated specimens were investigated in a comprehensive manner. Due to its major impact on the process, the chemical powder composition was characterized in detail by energy dispersive X-ray spectroscopy (EDX) and inductively coupled plasma optical emission spectrometry (ICP-OES). Moreover, a profound characterization of the powder morphology and flowability was carried out using scanning electron microscopy (SEM) and novel rheological investigation techniques. Furthermore, quantitative image analysis, mechanical testing, laser scanning microscopy, and 3D shape measurement of manufactured specimens were conducted. As a result, the gained knowledge was applied for the AM-specific redesign of the flexure pivot. Finally, a qualified flexure pivot has been manufactured in a hybrid manner to subsequently ensure its long-term durability in a lifetime test bench.


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