The nanogap pirani - a pressure sensor with superior linearity in atmospheric pressure range

Author(s):  
Kourosh Khosraviani ◽  
Albert M. Leung
2019 ◽  
Vol 16 (3) ◽  
pp. 149-156
Author(s):  
Yue Liu ◽  
Yuanxun Li ◽  
Yongcheng Lu ◽  
Hua Su ◽  
Zhihua Tao ◽  
...  

Abstract Because of good thermal, electrical, and mechanical properties, low-temperature cofired ceramic (LTCC) has shown great potential in microelectronic applications. One of the most promising directions of LTCC technology development are integrating and packing sensors. In this article, a wireless passive capacitive pressure sensor operating in the MHz range based on cofiring of heterogeneous materials with LTCC technology is proposed, and the design, simulation, and fabrication of the sensor are demonstrated and discussed. It consists of a circular spiral inductor and a capacitor of two electrodes separated by a glass medium. Furthermore, a unique process of cofiring of heterogeneous materials was introduced to avoid deformation of the capacitive embedded cavity during lamination or sintering. The results show that the inductance of the inductor and the capacitance of the capacitor embedded in the sensor are .28 μH and 16.80 pF, respectively. The novel sensor has a sensitivity of approximately 847 Hz/MPa within the pressure range from atmospheric pressure to 100 MPa.


2014 ◽  
Vol 7 (1) ◽  
pp. 65-79 ◽  
Author(s):  
R. M. Stauffer ◽  
G. A. Morris ◽  
A. M. Thompson ◽  
E. Joseph ◽  
G. J. R. Coetzee ◽  
...  

Abstract. Several previous studies highlight pressure (or equivalently, pressure altitude) discrepancies between the radiosonde pressure sensor and that derived from a GPS flown with the radiosonde. The offsets vary during the ascent both in absolute and percent pressure differences. To investigate this problem further, a total of 731 radiosonde/ozonesonde launches from the Southern Hemisphere subtropics to northern mid-latitudes are considered, with launches between 2005 and 2013 from both longer term and campaign-based intensive stations. Five series of radiosondes from two manufacturers (International Met Systems: iMet, iMet-P, iMet-S, and Vaisala: RS80-15N and RS92-SGP) are analyzed to determine the magnitude of the pressure offset. Additionally, electrochemical concentration cell (ECC) ozonesondes from three manufacturers (Science Pump Corporation; SPC and ENSCI/Droplet Measurement Technologies; DMT) are analyzed to quantify the effects these offsets have on the calculation of ECC ozone (O3) mixing ratio profiles (O3MR) from the ozonesonde-measured partial pressure. Approximately half of all offsets are > ±0.6 hPa in the free troposphere, with nearly a third > ±1.0 hPa at 26 km, where the 1.0 hPa error represents ~ 5% of the total atmospheric pressure. Pressure offsets have negligible effects on O3MR below 20 km (96% of launches lie within ±5% O3MR error at 20 km). Ozone mixing ratio errors above 10 hPa (~ 30 km), can approach greater than ±10% (> 25% of launches that reach 30 km exceed this threshold). These errors cause disagreement between the integrated ozonesonde-only column O3 from the GPS and radiosonde pressure profile by an average of +6.5 DU. Comparisons of total column O3 between the GPS and radiosonde pressure profiles yield average differences of +1.1 DU when the O3 is integrated to burst with addition of the McPeters and Labow (2012) above-burst O3 column climatology. Total column differences are reduced to an average of −0.5 DU when the O3 profile is integrated to 10 hPa with subsequent addition of the O3 climatology above 10 hPa. The RS92 radiosondes are superior in performance compared to other radiosondes, with average 26 km errors of −0.12 hPa or +0.61% O3MR error. iMet-P radiosondes had average 26 km errors of −1.95 hPa or +8.75 % O3MR error. Based on our analysis, we suggest that ozonesondes always be coupled with a GPS-enabled radiosonde and that pressure-dependent variables, such as O3MR, be recalculated/reprocessed using the GPS-measured altitude, especially when 26 km pressure offsets exceed ±1.0 hPa/±5%.


2020 ◽  
Vol 12 (14) ◽  
pp. 16691-16699 ◽  
Author(s):  
Han Byul Choi ◽  
Jinwon Oh ◽  
Youngsoo Kim ◽  
Mikhail Pyatykh ◽  
Jun Chang Yang ◽  
...  

2020 ◽  
Vol 91 (11) ◽  
pp. 113501
Author(s):  
Ante Hecimovic ◽  
Federico D’Isa ◽  
Emile Carbone ◽  
Aleksander Drenik ◽  
Ursel Fantz

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1103
Author(s):  
Jae Sang Heo ◽  
Keon Woo Lee ◽  
Jun Ho Lee ◽  
Seung Beom Shin ◽  
Jeong Wan Jo ◽  
...  

Among various wearable health-monitoring electronics, electronic textiles (e-textiles) have been considered as an appropriate alternative for a convenient self-diagnosis approach. However, for the realization of the wearable e-textiles capable of detecting subtle human physiological signals, the low-sensing performances still remain as a challenge. In this study, a fiber transistor-type ultra-sensitive pressure sensor (FTPS) with a new architecture that is thread-like suspended dry-spun carbon nanotube (CNT) fiber source (S)/drain (D) electrodes is proposed as the first proof of concept for the detection of very low-pressure stimuli. As a result, the pressure sensor shows an ultra-high sensitivity of ~3050 Pa−1 and a response/recovery time of 258/114 ms in the very low-pressure range of <300 Pa as the fiber transistor was operated in the linear region (VDS = −0.1 V). Also, it was observed that the pressure-sensing characteristics are highly dependent on the contact pressure between the top CNT fiber S/D electrodes and the single-walled carbon nanotubes (SWCNTs) channel layer due to the air-gap made by the suspended S/D electrode fibers on the channel layers of fiber transistors. Furthermore, due to their remarkable sensitivity in the low-pressure range, an acoustic wave that has a very tiny pressure could be detected using the FTPS.


2020 ◽  
Vol 53 (7-8) ◽  
pp. 1482-1492
Author(s):  
Shuo Liu ◽  
Chenguang Xu ◽  
Tongqi Liu ◽  
Yong Cai

In this work, a double-cylinder viscometer is designed to measure dynamic viscosity over a pressure range from atmospheric pressure up to 150 MPa and a temperature range of 278.15–333.15 K. A high-pressure closed cavity is designed innovatively and the magnetic coupling is adopted to transfer the torque to reduce the friction; the inner cylinder with ruby bearing is designed to reduce the friction torque, thus the accuracy of the viscosity measurement is improved. The experiment of measuring the standard viscosity liquid (N10 and N35) under normal pressure and measuring the viscosity of methylbenzene under the pressure of 0.1–150 MPa were carried out, and considering all the experimental data, the uncertainty of the viscosity measurements is approximately ±3%.


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