A novel TUB (thin-film under bulk) process for high-performance pressure sensors of sub-kPa measure-range

2016 ◽  
Author(s):  
Hongshuo Zou ◽  
Jiachou Wang ◽  
Xinxin Li
Keyword(s):  
Thin Film ◽  
High Performance ◽  
Pressure Sensors ◽  
Performance Pressure

A flexible pressure sensor based on an MXene–textile network structure

2019 ◽  
Vol 7 (4) ◽  
pp. 1022-1027 ◽  
Author(s):  
Tongkuai Li ◽  
Longlong Chen ◽  
Xiang Yang ◽  
Xin Chen ◽  
Zhihan Zhang ◽  
...  
Keyword(s):  
Network Structure ◽  
Pressure Sensor ◽  
High Performance ◽  
Pressure Sensors ◽  
Wearable Electronics ◽  
Physiological Signal ◽  
Signal Perception ◽  
Performance Pressure ◽  
Human Machine Interfaces ◽  
Flexible Pressure Sensor

High-performance pressure sensors have attracted considerable attention recently due to their promising applications in touch displays, wearable electronics, human–machine interfaces, and real-time physiological signal perception.

High‐performance pressure sensors using double silicon‐on‐insulator structures

1991 ◽  
Vol 62 (5) ◽  
pp. 1341-1346 ◽  
Author(s):  
Gwiy‐Sang Chung ◽  
Shoji Kawahito ◽  
Makoto Ishida ◽  
Tetsuro Nakamura ◽  
Mitsuo Kawashima ◽  
...  
Keyword(s):  
High Performance ◽  
Pressure Sensors ◽  
Silicon On Insulator ◽  
Performance Pressure

scholarly journals Orthogonal photochemistry-assisted printing of 3D tough and stretchable conductive hydrogels

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Hongqiu Wei ◽  
Ming Lei ◽  
Ping Zhang ◽  
Jinsong Leng ◽  
Zijian Zheng ◽  
...  
Keyword(s):  
3D Printing ◽  
High Performance ◽  
Pressure Sensors ◽  
Coupling Reaction ◽  
One Pot ◽  
Performance Pressure ◽  
3D Printed ◽  
Conductive Hydrogels ◽  
Extrusion Printing ◽  
Short Time

Abstract3D-printing tough conductive hydrogels (TCHs) with complex structures is still a challenging task in related fields due to their inherent contrasting multinetworks, uncontrollable and slow polymerization of conductive components. Here we report an orthogonal photochemistry-assisted printing (OPAP) strategy to make 3D TCHs in one-pot via the combination of rational visible-light-chemistry design and reliable extrusion printing technique. This orthogonal chemistry is rapid, controllable, and simultaneously achieve the photopolymerization of EDOT and phenol-coupling reaction, leading to the construction of tough hydrogels in a short time (tgel ~30 s). As-prepared TCHs are tough, conductive, stretchable, and anti-freezing. This template-free 3D printing can process TCHs to arbitrary structures during the fabrication process. To further demonstrate the merits of this simple OPAP strategy and TCHs, 3D-printed TCHs hydrogel arrays and helical lines, as proofs-of-concept, are made to assemble high-performance pressure sensors and a temperature-responsive actuator. It is anticipated that this one-pot rapid, controllable OPAP strategy opens new horizons to tough hydrogels.

High‐Performance Pressure Sensors Based on 3D Microstructure Fabricated by a Facile Transfer Technology

2019 ◽  
Vol 4 (5) ◽  
pp. 1800640 ◽  
Author(s):  
Songjia Han ◽  
Chunrui Liu ◽  
Zhaobin Huang ◽  
Jiwen Zheng ◽  
Huihua Xu ◽  
...  
Keyword(s):  
High Performance ◽  
Pressure Sensors ◽  
Performance Pressure ◽  
3D Microstructure

NiC: a highly sensitive functional layer based on a nickel/graphene thin film for pressure and force sensors.

2015 ◽  
Vol 2015 (CICMT) ◽  
pp. 000208-000212
Author(s):  
Ralf Koppert
Keyword(s):  
Thin Film ◽  
High Performance ◽  
Pressure Range ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Gauge Factor ◽  
Force Sensors ◽  
Functional Layer ◽  
Voltage Range ◽  
Technical Effort

A functional layer based on nickel and graphene called NiC was developed with the goal of a high strain sensitivity in combination with an adjustable temperature coefficient of resistance (TCR). A gauge factor up to 30 and TCR values of approximately 0±25 ppm/K can be achieved by variation of the film composition. Based on the increased sensitivity the important pressure range of below 2.5 bar is opened up for steel membrane pressure sensors without the need of a sophisticated technical effort. First pressure and force sensors with NiC functional layers were realized in order to demonstrate the high performance of this new material. The enlarged sensitivity of the film leads to a complex re-development of the microsystems “pressure and force sensors” in order to take the advantage of the high linearity, low hysteresis, high overload protection and stability. Due to the high sensitivity, it is possible to produce sensors with significantly increased stability values in the overload region. Using the same output voltage range as usual with NiCr thin film elements, the overload capability of the sensors with the new functional layer is about twenty times the characteristic value of NiCr sensors. On the other hand, the low pressure range is opened up since the membrane needs to be deformed only one tenth of its usual value. Because of this low stress the load cycle stability increases accordingly. Additionally base body materials like 1.4435 (316L), which are not very suitable for the production of pressure sensor membranes, can be used for example for hydrogen applications.

High-resolution scanning electron microscopy of thin-film magnetic media of magnetic recording disk

1992 ◽  
Vol 50 (2) ◽  
pp. 1334-1335
Author(s):  
K. Ogura ◽  
H. Nishioka ◽  
N. Ikeo ◽  
T. Kanazawa ◽  
J. Teshima
Keyword(s):  
Thin Film ◽  
Fine Structure ◽  
High Resolution ◽  
Magnetic Recording ◽  
High Performance ◽  
Magnetic Hysteresis ◽  
Grain Structure ◽  
Magnetic Media ◽  
Cross Sectional ◽  
Resolution Observation

Structural appraisal of thin film magnetic media is very important because their magnetic characters such as magnetic hysteresis and recording behaviors are drastically altered by the grain structure of the film. However, in general, the surface of thin film magnetic media of magnetic recording disk which is process completed is protected by several-nm thick sputtered carbon. Therefore, high-resolution observation of a cross-sectional plane of a disk is strongly required to see the fine structure of the thin film magnetic media. Additionally, observation of the top protection film is also very important in this field.Recently, several different process-completed magnetic disks were examined with a UHR-SEM, the JEOL JSM 890, which consisted of a field emission gun and a high-performance immerse lens. The disks were cut into approximately 10-mm squares, the bottom of these pieces were carved into more than half of the total thickness of the disks, and they were bent. There were many cracks on the bent disks. When these disks were observed with the UHR-SEM, it was very difficult to observe the fine structure of thin film magnetic media which appeared on the cracks, because of a very heavy contamination on the observing area.

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