In-situ nanoscale characterization of annealing effect on TiN/Ti/HfOx/TiN Structure for Resistive Random Access Memory (ReRAM)

Author(s):  
Hisashi Shima ◽  
Hiro Akinaga
2015 ◽  
Vol 5 (1) ◽  
Author(s):  
Masashi Arita ◽  
Akihito Takahashi ◽  
Yuuki Ohno ◽  
Akitoshi Nakane ◽  
Atsushi Tsurumaki-Fukuchi ◽  
...  

2013 ◽  
Vol 21 (1) ◽  
pp. 170-176 ◽  
Author(s):  
Hyun Woo Nho ◽  
Jong Yun Kim ◽  
Jian Wang ◽  
Hyun-Joon Shin ◽  
Sung-Yool Choi ◽  
...  

Here, anin situprobe for scanning transmission X-ray microscopy (STXM) has been developed and applied to the study of the bipolar resistive switching (BRS) mechanism in an Al/graphene oxide (GO)/Al resistive random access memory (RRAM) device. To performin situSTXM studies at the CK- and OK-edges, both the RRAM junctions and theI0junction were fabricated on a single Si3N4membrane to obtain local XANES spectra at these absorption edges with more delicateI0normalization. Using this probe combined with the synchrotron-based STXM technique, it was possible to observe unique chemical changes involved in the BRS process of the Al/GO/Al RRAM device. Reversible oxidation and reduction of GO induced by the externally applied bias voltages were observed at the OK-edge XANES feature located at 538.2 eV, which strongly supported the oxygen ion drift model that was recently proposed fromex situtransmission electron microscope studies.


2019 ◽  
Vol 11 (26) ◽  
pp. 23659-23666 ◽  
Author(s):  
Giovanni Vescio ◽  
Gemma Martín ◽  
Albert Crespo-Yepes ◽  
Sergi Claramunt ◽  
Daniel Alonso ◽  
...  

2020 ◽  
Vol 7 (1) ◽  
pp. 016307 ◽  
Author(s):  
Muhammad Ismail ◽  
Sobia Ali Khan ◽  
Mehr Khalid Rahmani ◽  
Junhyeok Choi ◽  
Zahida Batool ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document