One-step silicon substrate through-wafer etching process for high precision MEMS application

Author(s):  
X. C. Xu ◽  
W. J. Wu ◽  
H. F. Liu ◽  
J. Fan ◽  
J. Q. Liu ◽  
...  
Author(s):  
Aditya N. Das ◽  
Rakesh Murthy

A miniature replica of “Temple of Zeus” has been built on a 1cm2 silicon die. The micro components have been fabricated on SOI (silicon-on-insulator) wafer using photolithography patterning and DRIE (deep-reaction-ion-etching) process. These micro components have been picked up and manipulated using a vacuum micro needle mounted on a high precision microassembly robot. After alignment the components are bonded to the silicon substrate using epoxy adhesive. A spherical sapphire lens has also been mounted on a micro tower made of silicon. This lens acts as a light source which illuminates the micro temple by diffusing a ray of light onto it. This micro replica of “Temple of Zeus” and other micro structures as well, have been built as a part of research on automated 3D microassembly at ARRI’s Texas Microfactory which demonstrates the versatility in developing robust, cost efficient and heterogeneous microsystems of future.


2021 ◽  
Author(s):  
Dongjin Xie ◽  
Qiuyi Luo ◽  
Shen Zhou ◽  
Mei Zu ◽  
Haifeng Cheng

Inkjet printing of functional material has shown a wide range of application in advertzing, OLED display, printed electronics and other specialized utilities that require high-precision, mask-free, direct-writing deposition technique. Nevertheless,...


2014 ◽  
Vol 609-610 ◽  
pp. 1020-1022
Author(s):  
Zheng Yuan Zhang ◽  
Yang Cao ◽  
Yong Mei ◽  
Jian Gen Li ◽  
Zhi Cheng Feng

The fabrication of butterfly-shape resonator is key for high precision resonator, for requiring suspend on the silicon substrate. This paper is focused on the technology of making butterfly-shape resonator. the variety of structure design can be used to make butterfly-shape resonator have been analyzed, the structure of butterfly-shape resonator is obtained, and for reducing the etch surface roughness, KOH etching conditions, such as composition, concentration, and temperature of etch solution, have been done. Combining with above testing results, the structure design and optimization KOH etching technology are obtained ,based on the technology, using the boron etch stop technique , the silicon butterfly-shape resonator has been done, it can be used effectively in the fabrication of the silicon resonant sensor.


Sensors ◽  
2020 ◽  
Vol 20 (17) ◽  
pp. 4986
Author(s):  
Yichao Yang ◽  
Kohei Yamamoto ◽  
Victor Huarcaya ◽  
Christoph Vorndamme ◽  
Daniel Penkert ◽  
...  

Tracking moving masses in several degrees of freedom with high precision and large dynamic range is a central aspect in many current and future gravitational physics experiments. Laser interferometers have been established as one of the tools of choice for such measurement schemes. Using sinusoidal phase modulation homodyne interferometry allows a drastic reduction of the complexity of the optical setup, a key limitation of multi-channel interferometry. By shifting the complexity of the setup to the signal processing stage, these methods enable devices with a size and weight not feasible using conventional techniques. In this paper we present the design of a novel sensor topology based on deep frequency modulation interferometry: the self-referenced single-element dual-interferometer (SEDI) inertial sensor, which takes simplification one step further by accommodating two interferometers in one optic. Using a combination of computer models and analytical methods we show that an inertial sensor with sub-picometer precision for frequencies above 10 mHz, in a package of a few cubic inches, seems feasible with our approach. Moreover we show that by combining two of these devices it is possible to reach sub-picometer precision down to 2 mHz. In combination with the given compactness, this makes the SEDI sensor a promising approach for applications in high precision inertial sensing for both next-generation space-based gravity missions employing drag-free control, and ground-based experiments employing inertial isolation systems with optical readout.


2012 ◽  
Vol 64 (2) ◽  
pp. 304-308 ◽  
Author(s):  
Yong Hee Kim ◽  
Nam Seob Baek ◽  
Kook Hwa Kim ◽  
Sang-Don Jung

1949 ◽  
Vol 160 (1) ◽  
pp. 145-153
Author(s):  
Mansergh Shaw

The problems of precision manufacture in Australia, arising chiefly from her geographic isolation, are first discussed. The paper then takes one particular problem from the field of optical manufacture and shows how it was solved for the conditions prevailing in the Dominion. The problem discussed is the production of graticules, or reticles, for range-finders, predictors, gun sights, telescopes, binoculars, microscopes, collimators, and many other such instruments. The first part of the paper deals briefly with methods used in reproducing the pattern, particularly the ruling and etching process. The second, and much the larger, part of the paper deals with the design of the high precision machines which were made for ruling the glass disks preparatory to etching the pattern into the glass. Two such machines were developed, one generating the pattern from the movements of the machine itself, the other, a pantograph, by copying the pattern from master plates. A series of self-checking tests is described by which the accuracy of the generating machine could rapidly be tested to an accuracy of much better than 0·0001 inch. A brief survey of the complete process, from glass blank to finished graticule, is made in the Appendix.


2008 ◽  
Vol 205 (7) ◽  
pp. 1580-1584 ◽  
Author(s):  
Jing Ye ◽  
Qianwang Chen ◽  
Ying Xiong ◽  
Yisheng Chai ◽  
Peiran Chen

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Sara Abdel Razek ◽  
Ahmed B. Ayoub ◽  
Mohamed A. Swillam

Abstract Silver Nano-trees (AgNTs) were synthesized by one-step electroless method with different densities via water or ethylene glycol (EG) on silicon substrate in one minute. The density of AgNTs is controlled by changing the concentration of silver nitrate in etchant solution. The absorption of NTs fabricated via EG is higher than absorption of NTs without EG. The AgNTs are employed as substrates for surface-enhanced Raman scattering (SERS) and exhibit high sensitivity. The silver Nano-trees fabricated via ethylene glycol (AgNTs-EG) enhances the Raman spectrum of pyridine (Py) with higher enhancement factor. Moreover, the SERS-active substrates prepared by using EG were able to detect Pyridine with concentration as low as 0.005 mM, the ones fabricated by water could only detect Pyridine at concentration of 0.2 mM.


Sign in / Sign up

Export Citation Format

Share Document