Abstract
In recent years, the use of printing methods to fabricate electronic devices (printed electronics) has attracted attention because of their low cost and low environmental impact. Printing technology enables the high-throughput fabrication of electrical circuits on film substrates, providing inexpensive personal healthcare devices to monitor health status in real-time. Temperature detection is one of the central concerns as a fundamental physical quantity in various fields. In 2013, a highly sensitive flexible thermistor was reported by formulating aqueous inks of nickel oxide nanoparticles for inkjet printing. However, the calcinating of the nickel oxide (NiO) layer required a high-temperature process of more than 200°C, which required expensive polyimide films with high heat resistance. It is necessary to promote further the development of low-temperature processes for printed thermistors to realize flexible NTC thermistors at low cost using printed electronics technology. In screen printing and inkjet printing, the definition of the ink pattern applied on the substrate changes due to spreading and coffee distortion phenomena, and the thickness between sensors becomes non-uniform, which is a structural consistency problem that can lead to variations in sensing performance. This study developed a printing and low-temperature calcinating method of NTC thermistors with a temperature-sensitive layer of nickel oxide by using reverse offset printing. The NTC thermistors were fabricated by printing a comb-like pattern of silver nanoparticles and a thin nickel oxide film on a glass substrate. In addition, the low-temperature formation of a nickel oxide layer by oxygen plasma treatment was investigated, and XPS was used to carry out compositional analysis of the surface. Together with the plasma-assisted calcinating, a flexible NTC thermistor formed on polyethylene terephthalate (PEN) film is demonstrated.