Two-dimensional simulation of an electron cyclotron resonance discharge

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) ◽

10.1109/plasma.1999.829308 ◽

2003 ◽

Author(s):

J.H. Shiau ◽

J.H. Tsai ◽

S.H. Chen ◽

J.Y. Yang ◽

C.J. Chiou

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional ◽

Dimensional Simulation

Download Full-text

Two-dimensional simulation of an electron cyclotron resonance plasma source with power deposition and neutral gas depletion

Plasma Sources Science and Technology ◽

10.1088/0963-0252/11/3/306 ◽

2002 ◽

Vol 11 (3) ◽

pp. 260-265 ◽

Author(s):

Minghai Liu ◽

Xiwei Hu ◽

Guoyang Yu ◽

Qinchong Wu ◽

Yuan Pan

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Power Deposition ◽

Neutral Gas ◽

Dimensional Simulation ◽

Resonance Plasma

Download Full-text

A two-dimensional simulation of electron cyclotron resonance plasma and comparison with experimental data

Thin Solid Films ◽

10.1016/s0040-6090(98)01513-2 ◽

1999 ◽

Vol 341 (1-2) ◽

pp. 18-21 ◽

Author(s):

Chee Burm Shin ◽

Jin Seok Hur ◽

Soo Ghee Oh

Keyword(s):

Experimental Data ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Dimensional Simulation ◽

Resonance Plasma ◽

Comparison With Experimental Data

Download Full-text

Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition

Surface and Coatings Technology ◽

10.1016/s0257-8972(00)00798-2 ◽

2000 ◽

Vol 131 (1-3) ◽

pp. 29-33

Author(s):

Minghai Liu ◽

Xiwei Hu ◽

Hanming Wu ◽

Qinchong Wu ◽

Guoyang Yu ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Power Deposition ◽

Self Consistent ◽

Dimensional Simulation ◽

Resonance Plasma

Download Full-text

Two-dimensional numerical model of electron cyclotron resonance discharge with pointwise mappings

Review of Scientific Instruments ◽

10.1063/1.2166429 ◽

2006 ◽

Vol 77 (3) ◽

pp. 03A345

Author(s):

V. Eruhimov ◽

V. Semenov

Keyword(s):

Numerical Model ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional

Download Full-text

Preparation of transparent Nb/two-dimensional electron gas contacts by using electron cyclotron resonance plasma cleaning

Journal of Applied Physics ◽

10.1063/1.1290256 ◽

2000 ◽

Vol 88 (7) ◽

pp. 4440 ◽

Author(s):

Th. Schäpers ◽

R. P. Müller ◽

G. Crecelius ◽

H. Hardtdegen ◽

H. Lüth

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Gas ◽

Electron Cyclotron ◽

Plasma Cleaning ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Dimensional Electron Gas ◽

Resonance Plasma

Download Full-text

Electrical Properties of AlGaAs/GaAs Two-Dimensional Electron Gases (2DEGs) Grown on GaAs Substrates Cleaned by an Electron Cyclotron Resonance (ECR) Hydrogen Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.l1494 ◽

1996 ◽

Vol 35 (Part 2, No. 11B) ◽

pp. L1494-L1497 ◽

Author(s):

Naoto Kondo

Keyword(s):

Electrical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Two Dimensional ◽

Dimensional Electron ◽

Electron Gases ◽

Gaas Substrates

Download Full-text

One-Dimensional Simulation of Microwave Propagation in Electron Cyclotron Resonance Plasmas

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.872 ◽

1997 ◽

Vol 36 (Part 1, No. 2) ◽

pp. 872-876 ◽

Author(s):

Hiroshi Muta ◽

Tadanori Sakoda ◽

Yoko Ueda ◽

Yoshinobu Kawai

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Microwave Propagation ◽

One Dimensional ◽

Dimensional Simulation

Download Full-text

Linewidth anomaly of two-dimensional-electron cyclotron resonance in the extreme quantum limit

Physical Review B ◽

10.1103/physrevb.40.1716 ◽

1989 ◽

Vol 40 (3) ◽

pp. 1716-1719 ◽

Author(s):

C. T. Liu ◽

P. Mensz ◽

D. C. Tsui ◽

G. Weimann

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Quantum Limit ◽

Two Dimensional ◽

Dimensional Electron

Download Full-text

Two‐dimensional modeling of electron cyclotron resonance plasma production

Journal of Applied Physics ◽

10.1063/1.351566 ◽

1992 ◽

Vol 72 (7) ◽

pp. 2652-2658 ◽

Author(s):

Yasuyoshi Yasaka ◽

Atsushi Fukuyama ◽

Akimitsu Hatta ◽

Ryohei Itatani

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Production ◽

Dimensional Modeling ◽

Resonance Plasma

Download Full-text

Two‐dimensional mapping of plasma parameters using probes in an electron cyclotron resonance etching device

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578546 ◽

1993 ◽

Vol 11 (4) ◽

pp. 1317-1322 ◽

Author(s):

J. A. Meyer ◽

J. S. Hamers ◽

G.‐H. Kim ◽

N. Hershkowitz

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Two Dimensional ◽

Plasma Parameters ◽

Dimensional Mapping

Download Full-text