Diamond Deposition and Behavior of Atomic Carbon Species in a Low-Pressure Inductively Coupled Plasma
1999 ◽
Vol 38
(Part 1, No. 7B)
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pp. 4504-4507
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Keyword(s):
1998 ◽
Vol 332
(1-2)
◽
pp. 136-140
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Keyword(s):
Langmuir probe measurements in a low pressure inductively coupled plasma used for diamond deposition
1999 ◽
Vol 17
(3)
◽
pp. 721-725
◽
2020 ◽
Keyword(s):
2009 ◽
Vol 18
(2)
◽
pp. 025001
◽
Keyword(s):
2011 ◽
Vol 26
(7)
◽
pp. 1502
◽
1994 ◽
Vol 9
(12)
◽
pp. 1335
◽
Keyword(s):
2001 ◽
Vol 10
(3-7)
◽
pp. 388-392
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