Investigation of the 22 inch hot zone simulation and experiment of the CZ silicon crystal growth process
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2003 ◽
Vol 42
(Part 1, No. 3)
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pp. 1133-1138
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2014 ◽
Vol 401
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pp. 120-123
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2012 ◽
Vol 2012
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pp. 1-6
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2011 ◽
Vol 318
(1)
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pp. 318-323
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