Oxidation Modeling of Thin SiO/sub 2/ Using N/sub 2/O for Deep Submicron Cmos Technology

Author(s):  
S.C. Sun ◽  
H.Y. Chang ◽  
T.S. Chao
2012 ◽  
Vol 47 (6) ◽  
pp. 1394-1407 ◽  
Author(s):  
Marek Gersbach ◽  
Yuki Maruyama ◽  
Rahmadi Trimananda ◽  
Matt W. Fishburn ◽  
David Stoppa ◽  
...  

2009 ◽  
Vol 40 (6) ◽  
pp. 1007-1012 ◽  
Author(s):  
Yongseo Koo ◽  
Kwangyeob Lee ◽  
Kuidong Kim ◽  
Jongki Kwon

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