Wafer-Level Integration of High-Quality Bulk Piezoelectric Ceramics on Silicon

2013 ◽  
Vol 60 (6) ◽  
pp. 2022-2030 ◽  
Author(s):  
Ethem Erkan Aktakka ◽  
Rebecca L. Peterson ◽  
Khalil Najafi
Keyword(s):  
Piezoelectric Ceramics ◽  
Wafer Level ◽  
High Quality ◽  
Bulk Piezoelectric Ceramics

High Quality Integrated Inductor in Fan-out Wafer-Level Packaging Technology for mm-Wave Applications

2021 ◽  
Author(s):  
Kavin Senthil Murugesan ◽  
Mykola Chernobryvko ◽  
Sherko Zinal ◽  
Marco Rossi ◽  
Ivan Ndip ◽  
...  
Keyword(s):  
Wafer Level ◽  
High Quality ◽  
Packaging Technology ◽  
Integrated Inductor ◽  
Wafer Level Packaging

The Design and Simulation of Vibratory Ring Gyroscope

2014 ◽  
Vol 609-610 ◽  
pp. 1029-1032 ◽  
Author(s):  
Mei Yu Meng ◽  
Wen Dong Zhang
Keyword(s):  
Modeling And Simulation ◽  
Quality Factor ◽  
Resonant State ◽  
Vacuum Packaging ◽  
Q Factor ◽  
Wafer Level ◽  
Temperature Drift ◽  
High Quality ◽  
Small Temperature ◽  
Packaging Technology

This paper deals with design and simulation of vibratory ring gyroscope which has good performance as resisting vibration, resisting impact, small temperature drift because of the inherent symmetry of structure. The good performance of gyroscope has verified by detailed modeling and simulation. The manufacture of gyroscope using wafer level vacuum packaging technology making the gyroscope has high quality factor .At last we test the gyroscope and the Q factor is 20300 by detecting the resonant state of the gyroscope.

Wafer-level vacuum-encapsulated rate gyroscope with high quality factor in a commercial MEMS process

2017 ◽  
Vol 23 (8) ◽  
pp. 3745-3756 ◽  
Author(s):  
Adel Merdassi ◽  
Mohamad Nizar Kezzo ◽  
Vamsy P. Chodavarapu
Keyword(s):  
Quality Factor ◽  
High Quality Factor ◽  
Wafer Level ◽  
High Quality ◽  
Mems Process

scholarly journals Highly Efficient Low-frequency Energy Harvester Using Bulk Piezoelectric Ceramics

2013 ◽  
Vol 476 ◽  
pp. 012133 ◽  
Author(s):  
M Colin ◽  
S Basrour ◽  
L Rufer ◽  
C Bantignies ◽  
A Nguyen-Dinh
Keyword(s):  
Energy Harvester ◽  
Low Frequency ◽  
Piezoelectric Ceramics ◽  
Highly Efficient ◽  
Bulk Piezoelectric Ceramics
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