Unified model of hole trapping, 1/f noise, and thermally stimulated current in MOS devices

2002 ◽  
Vol 49 (6) ◽  
pp. 2674-2683 ◽  
Author(s):  
D.M. Fleetwood ◽  
H.D. Xiong ◽  
Z.-Y. Lu ◽  
C.J. Nicklaw ◽  
J.A. Felix ◽  
...  
2010 ◽  
Vol 645-648 ◽  
pp. 469-472
Author(s):  
Marko J. Tadjer ◽  
Karl D. Hobart ◽  
Robert E. Stahlbush ◽  
Patrick J. McMarr ◽  
Hap L. Hughes ◽  
...  

Thermally stimulated current (TSC) measurements on epitaxial and implanted 4H-SiC MOS capacitors are presented. The effect of gamma ray irradiation on the TSC spectra of epitaxial 4H-SiC MOSCAP devices is discussed. On non-irradiated samples, two TSC peaks are observed near 55 K and 80 K. Due to the generated oxide charge during irradiation, the 80 K emission split into two constituent peaks. These have been attributed to hole traps and Al acceptors.


2016 ◽  
Vol 858 ◽  
pp. 599-602 ◽  
Author(s):  
Yoshihito Katsu ◽  
Takuji Hosoi ◽  
Yuichiro Nanen ◽  
Tsunenobu Kimoto ◽  
Takayoshi Shimura ◽  
...  

We evaluated the effect of NO annealing on hole trapping characteristic of SiC metal-oxide-semiconductor (MOS) capacitor by measuring flatband voltage (VFB) shifts during a constant negative gate voltage stress under UV illumination. Under low stress voltages, the VFB shift due to hole trapping was found to be suppressed by NO annealing. However, the VFB shift of the NO-annealed device increases significantly with stress time under high stress voltage conditions, while the device without NO annealing showed only a slight shift. This result implies that NO annealing enhances generation of hole traps, leading to the degradation of SiC-MOS devices in long-term reliability.


2017 ◽  
Author(s):  
M. Hayashi ◽  
M. Sometani ◽  
T. Hatakeyama ◽  
H. Yano ◽  
S. Harada
Keyword(s):  

1988 ◽  
Vol 9 (11) ◽  
pp. 588-590 ◽  
Author(s):  
C. Chang ◽  
S. Haddad ◽  
B. Swaminathan ◽  
J. Lien

1991 ◽  
Vol 38 (6) ◽  
pp. 1066-1077 ◽  
Author(s):  
D.M. Fleetwood ◽  
R.A. Reber ◽  
P.S. Winokur

2018 ◽  
Vol 57 (4S) ◽  
pp. 04FR15 ◽  
Author(s):  
Mariko Hayashi ◽  
Mitsuru Sometani ◽  
Tetsuo Hatakeyama ◽  
Hiroshi Yano ◽  
Shinsuke Harada

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