Wafer-to-wafer transfer process of barium strontium titanate metal-insulator-metal structures by laser pre-irradiation and gold-gold bonding for frequency tuning applications

2013 ◽  
Author(s):  
T. Samoto ◽  
H. Hirano ◽  
T. Somekawa ◽  
K. Hikichi ◽  
M. Fujita ◽  
...  
Keyword(s):  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Transfer Process ◽  
Frequency Tuning ◽  
Metal Insulator ◽  
Metal Structures ◽  
Barium Strontium ◽  
Metal Insulator Metal

Wafer–to–wafer transfer process of barium strontium titanate for frequency tuning applications using laser pre-irradiation

2015 ◽  
Vol 25 (3) ◽  
pp. 035015 ◽  
Author(s):  
Tetuo Samoto ◽  
Hideki Hirano ◽  
Toshihiro Somekawa ◽  
Kousuke Hikichi ◽  
Masayuki Fujita ◽  
...  
Keyword(s):  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Transfer Process ◽  
Frequency Tuning ◽  
Barium Strontium

Influence of the Grain Size on the Conduction Mechanism of Barium Strontium Titanate Thin Films

2011 ◽  
Vol 66 (12) ◽  
pp. 784-790 ◽  
Author(s):  
Ala’eddin A. Saif ◽  
Zul Azhar Zahid Jamal ◽  
Prabakaran Poopalan
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Conduction Mechanism ◽  
Frequency Region ◽  
High Frequency Region ◽  
Debye Relaxation ◽  
Barium Strontium ◽  
Metal Insulator Metal

Sol-gel barium strontium titanate ( Ba0.6Sr0.4TiO3) thin films with different grain sizes have been successfully fabricated as metal-insulator-metal (MIM) capacitors. The perovskite structure of the material has been confirmed via X-ray diffraction (XRD). In order to correlate the effect of the grain size to the conduction mechanisms of these films, atomic force microscopy (AFM) results are presented. The grain size shows an important effect on the conduction mechanism for the films. The results show that as the grain size increases, both the impedance and the permittivity of the films decrease, whereas the conductivity shows an inverse variation. The Z* plane for all films shows two regions, corresponding to the bulk mechanism and the distribution of the grain boundaries-electrodes conduction process.M´´ versus frequency plots reveal non-Debye relaxation peaks, which are not able to be observed in the e´´ plots. Alternating current (AC) conductivity versus frequency plots show three regions of conduction processes, i.e. a low-frequency region due to direct current (DC) conduction, a mid-frequency region due to translational hopping motion, and a high-frequency region due to localized hopping and/or reorientational motion.

Radio Frequency (RF) Magnetron Sputtered Barium Strontium Titanate (BST) Thin Film

2017 ◽  
Vol 727 ◽  
pp. 942-946 ◽  
Author(s):  
Juan Li ◽  
Cong Chun Zhang ◽  
Yan Lei Wang ◽  
Yang Gao ◽  
Xiao Lin Zhao
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Dielectric Properties ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Perovskite Phase ◽  
Rf Magnetron Sputtering ◽  
Barium Strontium ◽  
Metal Insulator Metal ◽  
Bst Thin Film

Barium strontium titanate (BST) thin films with excellent dielectric properties are deposited by on-axis RF magnetron sputtering system. The effects of composition of the target and oxygen partial pressure on the microstructure of BST thin film have been investigated. The dielectric properties of the thin films are investigated. The results show that composition of BST thin film deposited with pure argon ambient by the target with 30atm% excess of Ba and Sr is stoichiometric. Perovskite phase can be observed in the thin film annealed in oxygen at 750 °C for 30 min. A metal-insulator-metal (MIM) capacitor is fabricated by microfabrication technique. The capacitance value at 2 GHz is 0.417 pF and 1.42 pF for 50 nm and 90 nm BST thin film respectively, and the leakage current density is 6×10-6 A/cm2 and 5.35×10-8 A/cm2 respectively.

scholarly journals A Highly Tunable Barium Strontium Titanate Thin Film MIM Varactor With Floating Metal

2021 ◽  
Author(s):  
S Nath
Keyword(s):  
Thin Film ◽  
Barium Strontium Titanate ◽  
Coplanar Waveguide ◽  
Frequency Range ◽  
Metal Insulator ◽  
Capacitance Density ◽  
Barium Strontium ◽  
Metal Insulator Metal ◽  
Field Dependent ◽  
Bst Thin Film

A ferroelectric metal insulator metal (MIM) varactor structure incorporating a floating metal and coplanar waveguide (CPW) has been introduced here. The work of the proposed varactor is based on the field-dependent material properties of (Ba,Sr)TiO3 (BST) thin film. A capacitance tunability of 44% has been achieved for the bias voltage of 0 V to 10 V over a frequency range of 1 GHz to 3 GHz. The proposed varactor structure yields a compact area, high capacitance density, and reduced mask process (2 masks)

Electrophoretic Deposition Ba0.65Sr0.35TiO3 Thick Films for Tunable Microwave Devices

2007 ◽  
Vol 336-338 ◽  
pp. 111-113
Author(s):  
Hao Xue ◽  
Chen Ai ◽  
Wei Zhao ◽  
He Ping Zhou
Keyword(s):  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Electrophoretic Deposition ◽  
Thick Films ◽  
Dielectric Constants ◽  
Barium Strontium ◽  
Tunable Microwave Device ◽  
Metal Insulator Metal ◽  
Tunable Microwave ◽  
Device Applications

Pure barium strontium titanate (Ba0.65Sr0.35TiO3) and MnO2-modified barium strontium titanate (Ba0.65Sr0.35TiO3-MnO2) thick films were fabricated by electrophoretic deposition technique. The structures and morphologies of the films were analyzed. The dielectric measurements were conducted on metal-insulator-metal capacitors using platinum as the bottom electrodes and gold as the top electrodes. The dielectric constants and dissipation factors of Ba0.65Sr0.35TiO3 and Ba0.65Sr0.35TiO3-15wt% MnO2 thick films were measured at a frequency of 1 MHz. The tunabilities of 12.5% and 9.3% were obtained for Ba0.65Sr0.35TiO3 and Ba0.65Sr0.35TiO3-MnO2 thick films under an applied electric field of 15 kV/cm, respectively. The dielectric properties of the present thick films were suitable for tunable microwave device applications.

scholarly journals A Highly Tunable Barium Strontium Titanate Thin Film MIM Varactor With Floating Metal

2021 ◽  
Author(s):  
S Nath
Keyword(s):  
Thin Film ◽  
Barium Strontium Titanate ◽  
Coplanar Waveguide ◽  
Frequency Range ◽  
Metal Insulator ◽  
Capacitance Density ◽  
Barium Strontium ◽  
Metal Insulator Metal ◽  
Field Dependent ◽  
Bst Thin Film

A ferroelectric metal insulator metal (MIM) varactor structure incorporating a floating metal and coplanar waveguide (CPW) has been introduced here. The work of the proposed varactor is based on the field-dependent material properties of (Ba,Sr)TiO3 (BST) thin film. A capacitance tunability of 44% has been achieved for the bias voltage of 0 V to 10 V over a frequency range of 1 GHz to 3 GHz. The proposed varactor structure yields a compact area, high capacitance density, and reduced mask process (2 masks)

Electrical and Structural Diagnostics of Barium Strontium Titanate (BST) Thin Films

2011 ◽  
Vol 1292 ◽  
Author(s):  
Supriya Ketkar ◽  
Manoj Kumar Ram ◽  
Ashok Kumar ◽  
Thomas Weller ◽  
Andrew Hoff
Keyword(s):  
Thin Films ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Sol Gel ◽  
Electrical Characterization ◽  
Film Structure ◽  
Production Costs ◽  
Bst Thin Films ◽  
Barium Strontium ◽  
Metal Insulator Metal

ABSTRACTThe properties of radio frequency, rf magnetron sputtered Barium Strontium Titanate (Ba1-xSrxTiO3), BST, thin films were investigated and compared with BST thin films deposited by sol-gel method with the aim of determining relationships between the oxide deposition parameters, the film structure, and the electric field dependence. This work presents noncontact electrical characterization of BST films using Corona Kelvin metrology (C-KM) which has been employed earlier only in the silicon industry. The films were structurally characterized using thickness profilometer, X-ray diffraction (XRD) and atomic force microscopy (AFM) techniques. The use of sol-gel technique to fabricate small area metal-insulator-metal (MIM) structures is found to be beneficial from the point of saving fabrication time and production costs.

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