Impact of metal electrodes on the figure of merit (kt2·Q) and spurious modes of contour mode AlN resonators
2011 ◽
Vol 17
(10-11)
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pp. 1599-1609
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Keyword(s):
1997 ◽
Vol 161
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pp. 711-717
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Keyword(s):
1981 ◽
Vol 20
(02)
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pp. 80-96
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1991 ◽
Vol 197
(3-4)
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Keyword(s):
2011 ◽
Vol 131
(8)
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pp. 1397-1402
Keyword(s):
2014 ◽
Vol 03
(10)
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pp. 16475-16479