Compliant Mesoscale Grinding of 3-Dimensional Free Form Shapes in Silicon Wafers

2002 ◽  
Author(s):  
B. Jiang ◽  
M. A. Shannon ◽  
M. L. Philpott
Keyword(s):  
Force Feedback ◽  
Defect Formation ◽  
Three Dimensional ◽  
Silicon Wafers ◽  
Free Form ◽  
Precision Grinding ◽  
New Approach ◽  
3 Dimensional ◽  
Grinding Method ◽  
Ultra Precision

This paper presents a new approach to create three-dimensional free form shapes in silicon wafers by compliant grinding. Instead of requiring high rigidity in traditional ultra-precision grinding systems, the proposed compliant grinding method requires relatively low rigidity. It achieves the required surface roughness, form accuracy and surface integrity by utilizing grinding force feedback and adaptive control. Compliant grinding mitigates microfractures, chipping, and defect formation in the silicon substrate, so that both electronic and mechanical properties of the Si are not degraded. A prototype silicon die grinder has been built and initial rough grinding results are promising.

Kinesthetically Augmented Mid-Air Sketching of Multi-Planar 3D Curve-Soups

2018 ◽  
Author(s):  
Ronak R. Mohanty ◽  
Umema H. Bohari ◽  
Vinayak ◽  
Eric Ragan
Keyword(s):  
Force Feedback ◽  
Three Dimensional ◽  
Free Form ◽  
Manual Labor ◽  
3D Design ◽  
Planar Curves ◽  
Kinesthetic Feedback ◽  
Curve Modeling

We present haptics-enabled mid-air interactions for sketching collections of three-dimensional planar curves — 3D curve-soups — as a means for 3D design conceptualization. Haptics-based mid-air interactions have been extensively studied for modeling of surfaces and solids. The same is not true for modeling curves; there is little work that explores spatiality, tangibility, and kinesthetics for curve modeling, as seen from the perspective of 3D sketching for conceptualization. We study pen-based mid air interactions for free-form curve input from the perspective of manual labor, controllability, and kinesthetic feedback. For this, we implemented a simple haptics-enabled workflow for users to draw and compose collections of planar curves on a force-enabled virtual canvas. We introduce a novel force-feedback metaphor for curve drawing, and investigate three novel rotation techniques within our workflow for both controlled and free-form sketching tasks.

A New Ultra-Precision Grinding Method for Manufacturing the Wavy-Tilt-Dam Mechanical Face Seals

2013 ◽  
Vol 56 (1) ◽  
pp. 65-74 ◽  
Author(s):  
Fengwei Huo ◽  
Dongming Guo ◽  
Guang Feng ◽  
Renke Kang
Keyword(s):  
Precision Grinding ◽  
Grinding Method ◽  
Face Seals ◽  
Ultra Precision

Design of 3-Dimensional Guidance Law of Missile Based on Discrete Sliding Mode

2013 ◽  
Vol 816-817 ◽  
pp. 976-980
Author(s):  
Nuan Wen ◽  
Zheng Hua Liu ◽  
Le Chang
Keyword(s):  
Discrete Time ◽  
Relative Motion ◽  
Sliding Mode ◽  
Dimensional Space ◽  
Three Dimensional ◽  
New Approach ◽  
3 Dimensional ◽  
Guidance Law ◽  
Guidance Laws ◽  
Three Dimensional Space

In this article, a new approach to design discrete-time sliding-mode guidance laws is presented based on the target-missile relative motion equation in three-dimensional space. This method significantly reduced system chattering and could be easily achieved on engineering. Furthermore, effectiveness of the proposed guidance laws is demonstrated through simulation by comparing with the traditional proportional guidance laws.

scholarly journals Study on the Algorithm of Three-Dimensional Surface Residual Material Height of Nano-ZrO2 Ceramics under Ultra-Precision Grinding

Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1363
Author(s):  
Yanyan Yan ◽  
Zhaoqing Zhang ◽  
Junli Liu ◽  
Haozhe Yan ◽  
Xiaoxu Wang
Keyword(s):  
Surface Quality ◽  
Calculation Method ◽  
Material Removal ◽  
Three Dimensional ◽  
Brittle Materials ◽  
Precision Grinding ◽  
Removal Process ◽  
Residual Material ◽  
Hard And Brittle Materials ◽  
Ultra Precision

A large number of studies have shown that the height of a residual material is the key factor affecting the surface quality of ultra-precision grinding. However, the grinding process contains several random factors, such as the randomness of grinding particle size and the random distribution of grinding particles, which cause the complexity of the material removal process. In this study, taking the Nano-ZrO2 as an example, the removal process of surface materials in ultra-precision grinding of hard and brittle materials was analyzed by probability. A new calculation method for the height of surface residual materials in ultra-precision grinding of Nano-ZrO2 was proposed, and the prediction model of the three-dimensional roughness Sa and Sq were established by using this calculation method. The simulation and experimental results show that this calculation method can obtain the more accurate surface residual material height value which accords with the characteristics of three-dimensional roughness sampling, which provides a theoretical reference for the analysis of the material removal process and the surface quality evaluation of ultra-precision grinding of hard and brittle materials.

scholarly journals A New Approach to the Non Relativistic Schrödinger Equation for an Energy-Depended Potential V(r,En,l)=V0(1+ηEn,l)r2 in both Noncommutative Three Dimensional Spaces and Phases

2015 ◽  
Vol 60 ◽  
pp. 11-19 ◽  
Author(s):  
Abdelmadjid Maireche
Keyword(s):  
Bound States ◽  
Zeeman Effect ◽  
Three Dimensional ◽  
Energy Spectra ◽  
Noncommutative Space ◽  
New Approach ◽  
3 Dimensional ◽  
New States ◽  
Space Phase ◽  
Ordinary Quantum

In present work we study the 3-dimensional non relativistic and noncommutative space-phase Schrödinger equation for modified potential (see formula in paper) depends on energy and quadratic on the relative distance, we have obtained the exact modified bound-states solutions. It has been observed that, the energy spectra in ordinary quantum mechanics was changed, and replaced by degenerate new states, depending on new discreet quantum numbers:n, l, j and s=±1/2 . We show the noncommutative new anisotropic Hamiltonian containing two new important terms, the first new term describe the spin-orbit interaction while the second describes the modified Zeeman effect.

Investigating Force-Feedback in Mid-Air Sketching of Multi-Planar Three-Dimensional Curve-Soups

2019 ◽  
Vol 20 (1) ◽  
Author(s):  
Ronak R. Mohanty ◽  
Ricardo M. Castillo ◽  
Eric D. Ragan ◽  
Vinayak R. Krishnamurthy
Keyword(s):  
Interaction Design ◽  
Force Feedback ◽  
Three Dimensional ◽  
Free Form ◽  
Planar Curves ◽  
Planar Surfaces ◽  
Kinesthetic Feedback ◽  
Quantitative Analyses ◽  
Rich Interaction

Abstract In this paper, we report on our investigation of haptics-enabled mid-air interactions for sketching three-dimensional (3D) curve-soups—collections of three-dimensional multi-planar curves. We study pen-based mid-air interactions for free-form curve input from the perspective of manual labor, controllability, and kinesthetic feedback. We specifically study the role of kinesthetic feedback for two aspects of mid-air sketching, namely, drawing curves on planar surfaces and spatial rotation of 3D curve-soups. For this, we implemented a simple haptics-enabled workflow for users to draw and compose collections of planar curves on a force-enabled virtual canvas. The qualitative and quantitative analyses of our study-tasks show that there is a rich interaction design space of kinesthetic feedback methods for mid-air sketching beyond physically currently prevalent models.

A Novel Piezoelectric Grinding Dynamometer for Monitoring Ultra-Precision Grinding of Silicon Wafers

2010 ◽  
Vol 126-128 ◽  
pp. 707-712 ◽  
Author(s):  
Jun Zhang ◽  
Bo Liu ◽  
Min Qian ◽  
Xiang Long Zhu ◽  
Ren Ke Kang
Keyword(s):  
Silicon Wafers ◽  
Precision Grinding ◽  
Ultra Precision

A Novel Piezoelectric Grinding Dynamometer for Monitoring Ultra-precision Grinding of Silicon Wafers

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