Optimal Architecture of Shack Hartmann Wave-Front Sensor for Microfluidic Applications
Means of measuring temperature and fluid flow in microelectromechanical systems (MEMS) continue to show limitations. This paper discusses the development of a noninvasive optical based temperature mapping technique for use in microsystems. The technique employs the Shack-Hartmann wave-front sensor (SHWFS), with documented accuracy in macroscale applications of ±0.7°C [1]. Microscale models indicate the potential to collect data with the same accuracy. With continued development, fluid flow monitoring by thermally seeding an element of fluid and using the SHWFS to detect the location of this heated element will be possible. This measurement technique can be applied to a variety of microfluidic devices, including biomedical devices, since the temperature "seed" can be small enough to prevent damage to sensitive biological systems.