Design and Analysis of a MEMS Based Auto-Focusing System
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This paper presents the design and analysis of a novel MEMS (Micro-Electro-Mechanical System) based auto-focusing system. By combining a folded in-plane optical path design and MEMS microfabricated optical components and comb drive actuator, the auto-focusing function is achieved in a compact system with continuously adjustable imaging distances. Theoretical analysis and numerical simulation validated the feasibility of the design. The auto-focusing system presented in this work is applicable to a wide range of technological fields where high resolution imaging is desired while the space is limited.
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2014 ◽
Vol 03
(03n04)
◽
pp. 1450008
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2019 ◽
Vol 08
(04)
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pp. 1950015
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1991 ◽
Vol 49
◽
pp. 650-651
1992 ◽
Vol 50
(1)
◽
pp. 416-417
Keyword(s):
1992 ◽
Vol 50
(2)
◽
pp. 942-943
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