A Coupled Model Between Torsion and Bending in Nano/Micromirrors Under the Combined Effect of Van Der Waals Force and Capillary Force

Author(s):  
Hamid Moeenfard ◽  
Ali Darvishian ◽  
Mohammad Taghi Ahmadian

The coupling effect between torsion and bending in nano/micromirrors under the combined effect of capillary force and van der Waals (vdW) force is presented in this paper. At the first, the dimensionless equations governing the statical behavior of the nano/micromirror are obtained using the minimum total potential energy principle. Then the equations governing the pull-in state of the mirror are obtained using the implicit function theorem. The related results show that neglecting bending effect can lead to considerable overestimation in predicting the pull-in limits of the nano/micromirror under combined vdW and capillary forces. It is observed that vdW force reduces the pull-in angle and pull-in deflection of the supporting torsion beams of the mirror. The static behavior of the nano/micromirror under capillary and vdW loading is also studied and the results reveal that the static behavior of the nano/micromirror under capillary and vdW forces highly depends on the bending of the torsion beams. The results of this paper can be used for a safe and stable design and fabrication of mirrors using the wet etching process, where the gap between the mirror and the underneath substrate is sufficiently small and as a results both capillary and vdW forces have significant role in the stability of the system.

Author(s):  
Ali Darvishian ◽  
Hamid Moeenfard ◽  
Hasan Zohoor ◽  
Mohammad Taghi Ahmadian

The current paper deals with the problem of static instability of Micro/Nano mirrors under the combined effect of capillary force and van der Waals force. First the governing equations of the statical behavior of Micro/Nano mirrors under the combined effect of capillary force and casimir force is obtained using the newtons first law of motion. The dependence of the critical tilting angle on the physical and geometrical parameters of the nano/micromirror and its supporting torsional beams is investigated. It is found that existence of vdW torque can considerably reduce the stability limits of the nano/micromirror. It is also found that rotation angle of the mirror due to capillary force highly depends on the vdW toque applied to the mirror. Finally analytical tool Homotopy Perturbation Mehtod (HPM) is utilized for prediction of the nano/micromirror behaviour under combined capillary and vdW force. It is observed that a sixth order perturbation approximation accurately predicts the rotation angle and stability limits of the mirror. Results of this paper can be used for successful fabrication of nano/micromirrors using wet etching process where capillary force plays a major role in the system.


2012 ◽  
Vol 26 (07) ◽  
pp. 1250056 ◽  
Author(s):  
HAMID MOEENFARD ◽  
ALI DARVISHIAN ◽  
HASSAN ZOHOOR ◽  
MOHAMMAD TAGHI AHMADIAN

In the current paper, the effect of van der Waals (vdW) force on the static behavior and pull-in characteristics of nano/micromirrors under capillary force is investigated. At first, the dimensionless equation governing the static behavior of nano/micromirrors is obtained. The dependence of the critical tilting angle on the physical and geometrical parameters of the nano/micromirror and its supporting torsional beams is investigated. It is found that the existence of vdW force can considerably reduce the stability limits of the nano/micromirror. It is also found that rotation angle of the mirror due to capillary force highly depends on the vdW force applied to the mirror. Finally, analytical tool Homotopy Perturbation Method (HPM) is utilized for prediction of the nano/micromirror behavior under combined capillary and vdW force. It is observed that a sixth order perturbation approximation accurately predicts the rotation angle and stability limits of the mirror. The results of this paper can be used for successful fabrication of nano/micromirrors using wet etching release process where capillary force plays a major role in the system.


Author(s):  
Jozef Havran ◽  
Martin Psotný

Abstract The stability analysis of a thin rectangular plate loaded in compression is presented. The nonlinear FEM equations are derived from the minimum total potential energy principle. The peculiarities of the effects of the initial imperfections are investigated using the user program. Special attention is paid to the influence of imperfections on the post-critical buckling mode. The FEM computer program using a 48 DOF element has been used for analysis. Full Newton-Raphson procedure has been applied.


Author(s):  
Hamid Moeenfard ◽  
Ali Darvishian ◽  
Mohammad Taghi Ahmadian

This paper deals with the problem of static instability of Micro/Nano mirrors under the combined effect of capillary force and Casimir force. At the First the governing equations of the statical behavior of Micro/Nano mirrors under the combined effect of capillary force and casimir force is obtained. The dependency of the critical tilting angle on the physical and geometrical parameters of the nano/micromirror and its supporting torsional beams is investigated. It is found that existence of casimir force can considerably reduce the stability limits of nano/micromirror. It is also found that rotation angle of the mirror due to capillary force highly depends on the casimir force applied to the mirror. Finally analytical tool Homotopy Perturbation Method (HPM) is utilized for prediction of the mirror’s behaviour under combined capillary and casimir forces. It is observed that a sixth order perturbation approximation accurately predicts the rotation angle and stability limits of the mirror. Results of this paper can be used for successful fabrication of nano/micromirrors using wet etching process where capillary force plays a major role in the system.


2020 ◽  
Vol 64 (1-4) ◽  
pp. 549-556
Author(s):  
Yajun Luo ◽  
Linwei Ji ◽  
Yahong Zhang ◽  
Minglong Xu ◽  
Xinong Zhang

The present work proposed an hourglass-type electromagnetic isolator with negative resistance (NR) shunt circuit to achieve the effective suppression of the micro-amplitude vibration response in various advanced instruments and equipment. By innovatively design of combining the displacement amplifier and the NR electromagnetic shunt circuit, the current new type of vibration isolator not only can effectively solve the problem of micro-amplitude vibration control, but also has significant electromechanical coupling effect, to obtain excellent vibration isolation performance. The design of the isolator and motion relationship is presented firstly. The electromechanical coupling dynamic model of the isolator is also given. Moreover, the optimal design of the NR electromagnetic shunt circuit and the stability analysis of the vibration isolation system are carried out. Finally, the simulation results about the transfer function and vibration responses demonstrated that the isolator has a significant isolation performance.


2019 ◽  
Author(s):  
Henrik Pedersen ◽  
Björn Alling ◽  
Hans Högberg ◽  
Annop Ektarawong

Thin films of boron nitride (BN), particularly the sp<sup>2</sup>-hybridized polytypes hexagonal BN (h-BN) and rhombohedral BN (r-BN) are interesting for several electronic applications given band gaps in the UV. They are typically deposited close to thermal equilibrium by chemical vapor deposition (CVD) at temperatures and pressures in the regions 1400-1800 K and 1000-10000 Pa, respectively. In this letter, we use van der Waals corrected density functional theory and thermodynamic stability calculations to determine the stability of r-BN and compare it to that of h-BN as well as to cubic BN and wurtzitic BN. We find that r-BN is the stable sp<sup>2</sup>-hybridized phase at CVD conditions, while h-BN is metastable. Thus, our calculations suggest that thin films of h-BN must be deposited far from thermal equilibrium.


1993 ◽  
Vol 171 (1-2) ◽  
pp. 89-95 ◽  
Author(s):  
Sean A.C. McDowell ◽  
A. David Buckingham

Author(s):  
Yi Zheng ◽  
Arvind Narayanaswamy

Lifshitz theory of van der Waals (vdW) force and energy is strictly valid when the location at which the stress tensor is calculated is in vacuum. Generalization of Lifshitz theory to the case when the stress tensor is to be calculated in a dissipative material, as opposed to vacuum, is a surprisingly difficult undertaking because there is no expression for the electromagnetic stress tensor in dissipative materials. Here, we derive the expression for vdW force in planar dissipative media by calculating the Maxwell stress tensor in a fictious layer of vacuum, that is eventually made to vanish, introduced in the structure, without employing the complicated quantum field theoretic method proposed by Dzyaloshinskii, Lifshitz, and Pitaevskii. Even though this work has proven to be a corroboration of Dzyaloshinskii et al., it has thrown new light on our understanding of vdW forces and suggests that it should be possible to achieve the similar result for objects with arbitrary shapes.


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