Laser reflectometry in situ monitoring structural and growth effects on the electron cyclotron resonance etching of In[sub 0.49]Ga[sub 0.51]P layers in Al-free laser structures
2001 ◽
Vol 19
(1)
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pp. 192
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1995 ◽
Vol 66
(11)
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pp. 5252-5256
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1995 ◽
Vol 13
(2)
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pp. 253
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Keyword(s):
1996 ◽
Vol 14
(3)
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pp. 1687
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1997 ◽
Vol 241-243
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pp. 1217-1221
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Keyword(s):
2000 ◽
Vol 9
(3-6)
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pp. 573-576
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1992 ◽
Vol 10
(6)
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pp. 2711
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