Analysis of the two-dimensional-dopant profile in a 90 nm complementary metal–oxide–semiconductor technology using scanning spreading resistance microscopy

Author(s):  
P. Eyben ◽  
D. Alvarez ◽  
M. Jurczak ◽  
R. Rooyackers ◽  
A. De Keersgieter ◽  
...  
2009 ◽  
Vol 21 (48) ◽  
pp. 4970-4974 ◽  
Author(s):  
Wen Hsin Chang ◽  
Chih Hsun Lee ◽  
Yao Chung Chang ◽  
Pen Chang ◽  
Mao Lin Huang ◽  
...  

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