Conformal MgO film grown at high rate at low temperature by forward-directed chemical vapor deposition
2018 ◽
Vol 36
(5)
◽
pp. 051504
◽
Keyword(s):
1993 ◽
Vol 32
(Part 1, No. 6B)
◽
pp. 3109-3112
◽
Keyword(s):
1995 ◽
Vol 13
(6)
◽
pp. 2924-2929
◽
1989 ◽
Vol 50
(C5)
◽
pp. C5-667-C5-672
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2006 ◽
Vol 10
(3)
◽
pp. 457-466
Keyword(s):