P‐1.7: Atomic‐Layer‐Deposition Deposited Superlattice‐Structure Al‐Zn‐O Films for Thin Film Transistors Application
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2014 ◽
Vol 61
(1)
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pp. 73-78
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2018 ◽
Vol 36
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pp. 060801
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2019 ◽
Vol 7
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pp. 453-461
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2018 ◽
Vol 439
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