Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxide

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0000516 ◽

2020 ◽

Vol 38 (6) ◽

pp. 064002

Author(s):

Carsten Bundesmann ◽

Anke Hellmich

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Energy Distributions ◽

Secondary Ions ◽

Beam Sputtering

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Temperature effect on structure and surface morphology of indium tin oxide films deposited by reactive ion-beam sputtering

Vacuum ◽

10.1016/j.vacuum.2005.11.035 ◽

2006 ◽

Vol 80 (7) ◽

pp. 708-711 ◽

Author(s):

S. Iwatsubo

Keyword(s):

Surface Morphology ◽

Temperature Effect ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Ion Beam ◽

Oxide Films ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Tin Oxide Films

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Ultraflat indium tin oxide films prepared by ion beam sputtering

Thin Solid Films ◽

10.1016/j.tsf.2004.05.125 ◽

2005 ◽

Vol 473 (2) ◽

pp. 218-223 ◽

Author(s):

Younggun Han ◽

Donghwan Kim ◽

Jun-Sik Cho ◽

Seok-Keun Koh

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Ion Beam ◽

Oxide Films ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Tin Oxide Films

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Nanostructure and Physical Properties Control of Indium Tin Oxide Films Prepared at Room Temperature through Ion Beam Sputtering Deposition at Oblique Angles

The Journal of Physical Chemistry C ◽

10.1021/acs.jpcc.9b02885 ◽

2019 ◽

Vol 123 (22) ◽

pp. 14036-14046 ◽

Author(s):

B. Lacroix ◽

A. J. Santos ◽

S. Hurand ◽

A. Corvisier ◽

F. Paumier ◽

...

Keyword(s):

Physical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Room Temperature ◽

Ion Beam ◽

Oxide Films ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

Beam Sputtering ◽

Tin Oxide Films

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In situ electrical and mechanical study of Indium Tin Oxide films deposited on polyimide substrate by Xe ion beam sputtering

Thin Solid Films ◽

10.1016/j.tsf.2021.139035 ◽

2022 ◽

Vol 741 ◽

pp. 139035

Author(s):

T. Chommaux ◽

P.O. Renault ◽

D. Thiaudière ◽

P. Godard ◽

F. Paumier ◽

...

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Ion Beam ◽

Oxide Films ◽

Ion Beam Sputtering ◽

Polyimide Substrate ◽

Mechanical Study ◽

Beam Sputtering ◽

Tin Oxide Films

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Effects of ion beam voltage on properties of indium tin oxide films prepared by ion beam sputtering

Surface Engineering ◽

10.1179/174329407x215311 ◽

2007 ◽

Vol 23 (4) ◽

pp. 295-299 ◽

Author(s):

D.-F. Lii ◽

J.-L. Huang ◽

I.-J. Jen ◽

S.-S. Lin

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Ion Beam ◽

Oxide Films ◽

Ion Beam Sputtering ◽

Beam Voltage ◽

Beam Sputtering ◽

Tin Oxide Films

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Effects of annealing on the properties of indium–tin oxide films prepared by ion beam sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2004.03.025 ◽

2005 ◽

Vol 192 (1) ◽

pp. 106-111 ◽

Author(s):

Ding-Fwu Lii ◽

Jow-Lay Huang ◽

Iau-Jiue Jen ◽

Su-Shia Lin ◽

Pavol Sajgalik

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Ion Beam ◽

Oxide Films ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Tin Oxide Films

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Effect of plasma exposure on the performance of indium tin oxide/InP solar cells prepared by radio‐frequency and ion‐beam sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573909 ◽

1986 ◽

Vol 4 (3) ◽

pp. 465-469 ◽

Author(s):

S. Naseem ◽

T. J. Coutts ◽

H. Aharoni

Keyword(s):

Solar Cells ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Plasma Exposure ◽

Beam Sputtering

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Properties of indium oxide/tin oxide multilayered films prepared by ion-beam sputtering

Journal of Materials Science ◽

10.1007/bf00547485 ◽

1988 ◽

Vol 23 (8) ◽

pp. 3026-3030 ◽

Author(s):

Takeyuki Suzuki ◽

Tsutomu Yamazaki ◽

Harunobu Oda

Keyword(s):

Indium Oxide ◽

Tin Oxide ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Multilayered Films ◽

Beam Sputtering

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Ion-beam sputtering of quartz samples: Material properties observed in the mass spectra of secondary ions

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques ◽

10.1134/s1027451011020054 ◽

2011 ◽

Vol 5 (1) ◽

pp. 172-176 ◽

Author(s):

P. I. Didenko ◽

A. A. Efremov

Keyword(s):

Material Properties ◽

Mass Spectra ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Secondary Ions ◽

Beam Sputtering

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Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam

Surface and Coatings Technology ◽

10.1016/s0257-8972(98)00759-2 ◽

1999 ◽

Vol 112 (1-3) ◽

pp. 267-270 ◽

Author(s):

Yong-Sahm Choe ◽

Jae-Ho Chung ◽

Dae-Seung Kim ◽

Hong Koo Baik

Keyword(s):

Tin Oxide ◽

Ion Beam ◽

Oxide Films ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering ◽

Tin Oxide Films

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