Line edge roughness reduction for EUV self-aligned double patterning by surface modification on spin-on-carbon and tone inversion technique

2021 ◽  
Vol 20 (02) ◽  
Author(s):  
Eric Liu ◽  
Katie Lutker-Lee ◽  
Qiaowei Lou ◽  
Ya-Ming Chen ◽  
Angélique Raley ◽  
...  
Keyword(s):  
Surface Modification ◽  
Line Edge Roughness ◽  
Inversion Technique ◽  
Edge Roughness ◽  
Double Patterning

Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach

2015 ◽  
Author(s):  
E. Dupuy ◽  
E. Pargon ◽  
M. Fouchier ◽  
H. Grampeix ◽  
J. Pradelles ◽  
...  
Keyword(s):  
Spectral Analysis ◽  
Line Width ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Double Patterning

Resistivity Impact from Modulated Line-Edge-Roughness with Self-aligned Double Patterning

2020 ◽  
Author(s):  
Dewei Xu ◽  
KuangChung Chuang ◽  
Wayne Zhao ◽  
Keith Donegan ◽  
Seung-Yeop Kook ◽  
...  
Keyword(s):  
Line Edge Roughness ◽  
Edge Roughness ◽  
Double Patterning

scholarly journals Effect of double-patterning and double-etching on the line-edge-roughness of multi-gate bulk MOSFETs

2013 ◽  
Vol 10 (5) ◽  
pp. 20130108-20130108 ◽  
Author(s):  
In Jun Park ◽  
Changhwan Shin
Keyword(s):  
Line Edge Roughness ◽  
Edge Roughness ◽  
Double Patterning

Line Edge Roughness (LER) correlation and dielectric reliability with Spacer-Defined Double Patterning (SDDP) at 20nm half pitch

2011 ◽  
Author(s):  
Yong Kong Siew ◽  
Michele Stucchi ◽  
Janko Versluijs ◽  
Philippe Roussel ◽  
Eddy Kunnen ◽  
...  
Keyword(s):  
Line Edge Roughness ◽  
Edge Roughness ◽  
Double Patterning

Line edge roughness (LER) reduction strategies for EUV self-aligned double patterning (SADP)

2021 ◽  
Author(s):  
Eric Liu ◽  
Katie Lutker-Lee ◽  
Qiaowei Lou ◽  
Ya-Ming Chen ◽  
Angelique Raley ◽  
...  
Keyword(s):  
Line Edge Roughness ◽  
Edge Roughness ◽  
Reduction Strategies ◽  
Double Patterning

Characterization of Line-Edge Roughness in Cu/Low-kInterconnect Pattern

2008 ◽  
Vol 47 (4) ◽  
pp. 2501-2505 ◽  
Author(s):  
Atsuko Yamaguchi ◽  
Daisuke Ryuzaki ◽  
Ken-ichi Takeda ◽  
Jiro Yamamoto ◽  
Hiroki Kawada ◽  
...  
Keyword(s):  
Line Edge Roughness ◽  
Edge Roughness
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