Hot-carrier degradation study of high-density plasma (HDP) oxide deposition process in deep-submicron NMOSFETs

1999 ◽  
Author(s):  
Pei Yao ◽  
Xu Zeng ◽  
Keng F. Lo ◽  
Qiang Guo ◽  
Pee Y. Tan
Keyword(s):  
Deposition Process ◽  
Deep Submicron ◽  
High Density ◽  
Degradation Study ◽  
Hot Carrier ◽  
Oxide Deposition ◽  
Density Plasma ◽  
Hot Carrier Degradation

Impact of E-E scattering to the hot carrier degradation of deep submicron NMOSFETs

1998 ◽  
Vol 19 (12) ◽  
pp. 463-465 ◽  
Author(s):  
S.E. Rauch ◽  
F.J. Guarin ◽  
G. LaRosa
Keyword(s):  
Deep Submicron ◽  
Hot Carrier ◽  
Hot Carrier Degradation

Effects of high-density plasma processing on MOSFET matching, noise, and hot carrier reliability

1999 ◽  
Author(s):  
Sidhartha Sen ◽  
Edward B. Harris ◽  
Richard W. Gregor ◽  
Samuel Martin ◽  
Mahjoub A. Abdelgadir ◽  
...  
Keyword(s):  
Plasma Processing ◽  
High Density ◽  
Hot Carrier ◽  
Density Plasma
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