Negative-tone CAR resists for e-beam lithography: modification of chemical composition for R&D application (high resolution) or production application (high sensitivity)

2002 ◽  
Author(s):  
Murielle Charpin ◽  
Laurent Pain ◽  
Serge V. Tedesco ◽  
C. Gourgon ◽  
A. Andrei ◽  
...  
2013 ◽  
Vol 135 (11) ◽  
pp. 4203-4206 ◽  
Author(s):  
Guorong Sun ◽  
Sangho Cho ◽  
Corrie Clark ◽  
Stanislav V. Verkhoturov ◽  
Michael J. Eller ◽  
...  

Author(s):  
Kazumichi Ogura ◽  
Michael M. Kersker

Backscattered electron (BE) images of GaAs/AlGaAs super lattice structures were observed with an ultra high resolution (UHR) SEM JSM-890 with an ultra high sensitivity BE detector. Three different types of super lattice structures of GaAs/AlGaAs were examined. Each GaAs/AlGaAs wafer was cleaved by a razor after it was heated for approximately 1 minute and its crosssectional plane was observed.First, a multi-layer structure of GaAs (100nm)/AlGaAs (lOOnm) where A1 content was successively changed from 0.4 to 0.03 was observed. Figures 1 (a) and (b) are BE images taken at an accelerating voltage of 15kV with an electron beam current of 20pA. Figure 1 (c) is a sketch of this multi-layer structure corresponding to the BE images. The various layers are clearly observed. The differences in A1 content between A1 0.35 Ga 0.65 As, A1 0.4 Ga 0.6 As, and A1 0.31 Ga 0.69 As were clearly observed in the contrast of the BE image.


Author(s):  
F. Nicastro ◽  
J. Kaastra ◽  
C. Argiroffi ◽  
E. Behar ◽  
S. Bianchi ◽  
...  

AbstractMetals form an essential part of the Universe at all scales. Without metals we would not exist, and the Universe would look completely different. Metals are primarily produced via nuclear processes in stars, and spread out through winds or explosions, which pollute the surrounding space. The wanderings of metals in-and-out of astronomical objects are crucial in determining their own evolution and thus that of the Universe as a whole. Detecting metals and assessing their relative and absolute abundances and energetics can thus be used to trace the evolution of these cosmic components. The scope of this paper is to highlight the most important open astrophysical problems that will be central in the next decades and for which a deep understanding of the Universe’s wandering metals, their physical and kinematical states, and their chemical composition represents the only viable solution. The majority of these studies can only be efficiently performed through High Resolution Spectroscopy in the soft X-ray band.


2006 ◽  
Vol 23 (9) ◽  
pp. 2415-2417
Author(s):  
Deng Lun-Hua ◽  
Gao Xiao-Ming ◽  
Cao Zhen-Song ◽  
Zhao Wei-Xiong ◽  
Zhang Wei-Jun

Sign in / Sign up

Export Citation Format

Share Document