Effect of line-edge roughness (LER) and line-width roughness (LWR) on sub-100-nm device performance
2013 ◽
Vol 60
(11)
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pp. 3669-3675
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2003 ◽
Vol 16
(3)
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pp. 387-393
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Keyword(s):
2014 ◽
Vol 54
(1)
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pp. 016502
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Keyword(s):