Application of cellular neural networks in the measurement of line-width and line edge roughness
Keyword(s):
2013 ◽
Vol 60
(11)
◽
pp. 3669-3675
◽
Keyword(s):
Keyword(s):
2014 ◽
Vol 54
(1)
◽
pp. 016502
◽
Keyword(s):
2013 ◽
Vol 12
(4)
◽
pp. 041302
◽
Keyword(s):