A theoretical study of the electromagnetic propagation in a complex medium suspended multilayer coplanar waveguide (CPW) is presented. The study is based on the generalized exponential matrix technique (GEMT) combined with Galerkin’s spectral method of moments applied to a CPW printed on a bianisotropic medium. The analytical formulation is based on a Full-GEMT, a method that avoids usual procedures of heavy and tedious mathematical expressions in the development of calculations and uses matrix-based mathematical expressions instead. These particularities are exploited to develop a mathematical model for the characterization of wave propagation in a three-layer shielded suspended CPW structure. This study is based on the development of mathematical formulations in full compact matrix-based expressions resulting in Green’s functions in a matrix form. The implemented method incorporates a new accelerating procedure developed in the GEMT which provides an initial value used to speed up searching for the exact solution in the principal computation code. This helped us to obtain accurate solutions with tolerable computing time. Good agreements have been achieved with the literature in terms of accuracy and rapid convergence. The results for different cases of bianisotropy have been investigated, and particularly, the effect on the dispersion characteristics is presented and compared with the isotropic case.
AbstractThis paper reports on the fabrication and characterization of microelectromechanical bridge resonators on glass substrates using thin-film technology and surface micromachining. All the processing steps are performed at temperatures below 110°C. The microbridges consist of either a single layer of heavily doped n-type amorphous silicon (n+-a-Si:H) or bilayers of aluminum (Al) and intrinsic a-Si:H. The bridge is suspended over a gate electrode with a 1 μm air-gap. Applying a voltage between the bridge and an underlying Al gate electrode electrostatically actuates the microstructures. The resulting deflection is monitored optically. The resonance of the microbridges is measured in air and in vacuum. Resonance frequencies up to 70 MHz and quality factors up to 3000 are obtained at pressures below 1 Torr. The energy dissipation mechanisms of the resonators are discussed.
Characterization of Epitaxial Heavily Doped Silicon Regions Formed by Hot-Wire Chemical Vapor Deposition Using Micro-Raman and Microphotoluminescence Spectroscopy