Characterization of Epitaxial Heavily Doped Silicon Regions Formed by Hot-Wire Chemical Vapor Deposition Using Micro-Raman and Microphotoluminescence Spectroscopy
2018 ◽
Vol 8
(3)
◽
pp. 813-819
◽
Keyword(s):
Hot Wire
◽
2002 ◽
Vol 20
(3)
◽
pp. 828
◽
Keyword(s):
2007 ◽
Vol 46
(4A)
◽
pp. 1415-1426
◽
2020 ◽
Vol 9
(1)
◽
pp. 37-40
Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 4B)
◽
pp. 2526-2529
◽