Investigation of plasma characteristics in an unbalanced magnetron sputtering system

2009 ◽  
Vol 35 (5) ◽  
pp. 399-408 ◽  
Author(s):  
A. A. Solov’ev ◽  
N. S. Sochugov ◽  
K. V. Oskomov ◽  
S. V. Rabotkin
Keyword(s):  
Magnetron Sputtering ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Plasma Characteristics ◽  
Sputtering System

scholarly journals Single Langmuir Probe Measurements in an Unbalanced Magnetron Sputtering System

2012 ◽  
Vol 32 ◽  
pp. 962-968 ◽  
Author(s):  
K. Honglertkongsakul ◽  
S. Chaiyakun ◽  
N. Witit-anun ◽  
W. Kongsri ◽  
P. Limsuwan
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Langmuir Probe Measurements ◽  
Probe Measurements ◽  
Sputtering System
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