Comparative Study on in-situ Ellipsometric Monitoring of III-Nitride Film Growth via Plasma-Enhanced Atomic Layer Deposition
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2019 ◽
Vol 37
(2)
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pp. 020927
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2018 ◽
Vol 89
(12)
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pp. 123702
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2009 ◽
Vol 114
(1)
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pp. 383-388
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2008 ◽
Vol 281
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pp. 35-43
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2020 ◽
Vol 124
(49)
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pp. 27250-27250
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