FORMATION OF HIGH ENERGY MICROBEAMS AND THEIR APPLICATION TO MICROELECTRONICS

1992 ◽  
Vol 02 (02) ◽  
pp. 107-128 ◽  
Author(s):  
MIKIO TAKAI
Keyword(s):  
Three Dimensional ◽  
Quadrupole Doublet ◽  
Spot Size ◽  
High Energy ◽  
Beam Optics ◽  
X Ray ◽  
Beam Spot Size ◽  
Radiation Damages ◽  
Magnetic Quadrupole ◽  
Light Ions

Scanning nuclear microprobes using Rutherford backscattering (RBS) and particle-induced X-ray emission (PIXE) with light ions have been formed using variable objective slits and a magnetic quadrupole doublet. Beam optics, focusing techniques, factors limiting the minimum beam-spot size, and data acquisition systems are discussed. Two- and three-dimensional RBS mapping and channeling contrast mapping of processed semiconductor layers such as multilayered wiring and focused ion-implanted layers are demonstrated. Problems with microbeam analysis such as radiation damages due to the probe beams are discussed.

Development of a high-current microbeam system

2014 ◽  
Vol 24 (03n04) ◽  
pp. 101-110 ◽  
Author(s):  
S. Matsuyama ◽  
K. Ishii ◽  
S. Suzuki ◽  
A. Terakawa ◽  
M. Fujiwara ◽  
...  
Keyword(s):  
Quadrupole Doublet ◽  
Spot Size ◽  
Beam Current ◽  
Chemical State ◽  
High Current ◽  
Rigid Support ◽  
Beam Spot ◽  
X Ray ◽  
Beam Spot Size

We report on the development of a high-current microbeam system for wavelength-dispersive X-ray micro particle-induced X-ray emission (WDX-[Formula: see text]-PIXE) for chemical state mapping. The microbeam system is composed of two slits and a quadrupole doublet lens mounted on a heavy rigid support. The microbeam system is installed immediately after a switching magnet. A beam brightness of [Formula: see text] is obtained at a half-divergence of 0.1 mrad. A beam current of more than 300 pA is obtained for object sizes of [Formula: see text] with a half-divergence of 0.2 mrad, which corresponds to a beam spot size of [Formula: see text]. The calculated spot size of the beam was [Formula: see text] and the measured spot size was [Formula: see text]. The WDX-[Formula: see text]-PIXE system with the microbeam system is now operational.

DEVELOPMENT OF AN EXTERNAL MICROBEAM-PIXE SYSTEM USING THIN FILM WINDOWS

1999 ◽  
Vol 09 (03n04) ◽  
pp. 143-150 ◽  
Author(s):  
A. KINOMURA ◽  
Y. HORINO ◽  
Y. MOKUNO ◽  
A. CHAYAHARA ◽  
N. TSUBOUCHI
Keyword(s):  
Thin Film ◽  
Proton Beam ◽  
Quadrupole Doublet ◽  
Spot Size ◽  
Polyimide Films ◽  
Emission Analysis ◽  
X Ray ◽  
Magnetic Quadrupole

A external microbeam system using polyimide windows has been developed for PIXE (Particle Induced X-ray Emission) analysis in air. A beamline consists of a magnetic quadrupole-doublet lens, cylindrical objective slits and double-deflection scanning coils. Polyimide films with a thickness of 3.5 μm or 7.5 μm were used for the exit windows. Spot sizes in air were measured by beam-induced fluorescence of CsI scintillation plates. A minimum spot size obtained was about 10 μm for a 1.5 MeV proton beam. PIXE-mapping images of a Cu grid were successfully obtained in air.

Epitaxial Ni nanoparticles on CaF2(001), (110) and (111) surfaces studied by three-dimensional RHEED, GIXD and GISAXS reciprocal-space mapping techniques

2017 ◽  
Vol 50 (3) ◽  
pp. 830-839 ◽  
Author(s):  
S. M. Suturin ◽  
V. V. Fedorov ◽  
A. M. Korovin ◽  
N. S. Sokolov ◽  
A. V. Nashchekin ◽  
...  
Keyword(s):  
Lattice Structure ◽  
Three Dimensional ◽  
Grazing Incidence ◽  
High Energy ◽  
Reciprocal Space ◽  
Mapping Technique ◽  
Face Centered Cubic ◽  
X Ray ◽  
Cubic Lattice ◽  
Face Centered

The development of growth techniques aimed at the fabrication of nanoscale heterostructures with layers of ferroic 3dmetals on semiconductor substrates is very important for their potential usage in magnetic media recording applications. A structural study is presented of single-crystal nickel island ensembles grown epitaxially on top of CaF2/Si insulator-on-semiconductor heteroepitaxial substrates with (111), (110) and (001) fluorite surface orientations. The CaF2buffer layer in the studied multilayer system prevents the formation of nickel silicide, guides the nucleation of nickel islands and serves as an insulating layer in a potential tunneling spin injection device. The present study, employing both direct-space and reciprocal-space techniques, is a continuation of earlier research on ferromagnetic 3dtransition metals grown epitaxially on non-magnetic and magnetically ordered fluorides. It is demonstrated that arrays of stand-alone faceted nickel islands with a face-centered cubic lattice can be grown controllably on CaF2surfaces of (111), (110) and (001) orientations. The proposed two-stage nickel growth technique employs deposition of a thin seeding layer at low temperature followed by formation of the islands at high temperature. The application of an advanced three-dimensional mapping technique exploiting reflection high-energy electron diffraction (RHEED) has proved that the nickel islands tend to inherit the lattice orientation of the underlying fluorite layer, though they exhibit a certain amount of {111} twinning. As shown by scanning electron microscopy, grazing-incidence X-ray diffraction (GIXD) and grazing-incidence small-angle X-ray scattering (GISAXS), the islands are of similar shape, being faceted with {111} and {100} planes. The results obtained are compared with those from earlier studies of Co/CaF2epitaxial nanoparticles, with special attention paid to the peculiarities related to the differences in lattice structure of the deposited metals: the dual-phase hexagonal close-packed/face-centered cubic lattice structure of cobalt as opposed to the single-phase face-centered cubic lattice structure of nickel.

scholarly journals Fast high-energy X-ray imaging for Severe Accidents experiments on the future PLINIUS-2 platform

2018 ◽  
Vol 170 ◽  
pp. 08003
Author(s):  
L. Berge ◽  
N. Estre ◽  
D. Tisseur ◽  
E. Payan ◽  
D. Eck ◽  
...  
Keyword(s):  
Large Scale ◽  
Spot Size ◽  
High Energy ◽  
Simulation Software ◽  
Small Scale ◽  
Noise Sources ◽  
X Ray ◽  
X Ray Imaging ◽  
The Future ◽  
Set Up

The future PLINIUS-2 platform of CEA Cadarache will be dedicated to the study of corium interactions in severe nuclear accidents, and will host innovative large-scale experiments. The Nuclear Measurement Laboratory of CEA Cadarache is in charge of real-time high-energy X-ray imaging set-ups, for the study of the corium-water and corium-sodium interaction, and of the corium stratification process. Imaging such large and high-density objects requires a 15 MeV linear electron accelerator coupled to a tungsten target creating a high-energy Bremsstrahlung X-ray flux, with corresponding dose rate about 100 Gy/min at 1 m. The signal is detected by phosphor screens coupled to high-framerate scientific CMOS cameras. The imaging set-up is established using an experimentally-validated home-made simulation software (MODHERATO). The code computes quantitative radiographic signals from the description of the source, object geometry and composition, detector, and geometrical configuration (magnification factor, etc.). It accounts for several noise sources (photonic and electronic noises, swank and readout noise), and for image blur due to the source spot-size and to the detector unsharpness. In a view to PLINIUS-2, the simulation has been improved to account for the scattered flux, which is expected to be significant. The paper presents the scattered flux calculation using the MCNP transport code, and its integration into the MODHERATO simulation. Then the validation of the improved simulation is presented, through confrontation to real measurement images taken on a small-scale equivalent set-up on the PLINIUS platform. Excellent agreement is achieved. This improved simulation is therefore being used to design the PLINIUS-2 imaging set-ups (source, detectors, cameras, etc.).

scholarly journals ON THE INTERACTION OF JETS WITH STELLAR WINDS IN MASSIVE X–RAY BINARIES

2010 ◽  
Vol 19 (06) ◽  
pp. 791-796
Author(s):  
MANEL PERUCHO ◽  
VALENTÍ BOSCH-RAMON ◽  
DMITRY KHANGULYAN
Keyword(s):  
Stellar Wind ◽  
Binary Star ◽  
Three Dimensional ◽  
High Energy ◽  
X Ray ◽  
Energy Emission ◽  
Injection Power ◽  
Radio Band ◽  
High Energy Emission ◽  
X Ray Binaries

We present the first three-dimensional simulations of the evolution of a microquasar jet inside the binary star system. The aim is to study the interaction of these jets with the stellar wind from a massive companion and the possible locations of high-energy emission sites. We have simulated two jets with different injection power in order to give a hint on the minimum power required for the jet to escape the system and become visible in larger scales. In the setup, we include a massive star wind filling the grid through which the jet evolves. We show that jets should have powers of the order of 1037 erg s-1 or more in order not to be destroyed by the stellar wind. The jet–wind interaction results in regions in which high-energy emission could be produced. These results imply the possible existence of a population of X–ray binaries undetected in the radio band due to jet disruption inside the region dominated by the stellar wind.

Magnetic quadrupole doublet focusing system for high energy ions

2008 ◽  
Vol 79 (3) ◽  
pp. 036102 ◽  
Author(s):  
Gary A. Glass ◽  
Alexander D. Dymnikov ◽  
Bibhudutta Rout ◽  
Johnny F. Dias ◽  
Louis M. Houston ◽  
...  
Keyword(s):  
Quadrupole Doublet ◽  
High Energy ◽  
Magnetic Quadrupole ◽  
High Energy Ions

scholarly journals Three-dimensional α colony characterization and prior-β grain reconstruction of a lamellar Ti–6Al–4V specimen using near-field high-energy X-ray diffraction microscopy

2015 ◽  
Vol 48 (4) ◽  
pp. 1165-1171 ◽  
Author(s):  
E. Wielewski ◽  
D. B. Menasche ◽  
P. G. Callahan ◽  
R. M. Suter
Keyword(s):  
Near Field ◽  
Three Dimensional ◽  
High Energy ◽  
Grain Structure ◽  
X Ray Diffraction ◽  
Orientation Field ◽  
X Ray ◽  
Hexagonal Close Packed ◽  
Flood Fill ◽  
Diffraction Microscopy

Near-field high-energy X-ray diffraction microscopy has been used to characterize the three-dimensional (3-D) crystallographic orientation field of the hexagonal close-packed α phase in a bulk Ti–6Al–4V specimen with a lamellar (β-annealed) microstructure. These data have been segmented using a 3-D misorientation-based grain finding algorithm, providing unprecedented information about the complex 3-D morphologies and spatial misorientation distributions of the transformed α lamella colonies. A 3-D Burgers orientation relationship-based flood-fill algorithm has been implemented to reconstruct the morphologies and crystallographic orientations of the high-temperature body-centered cubic prior-β grains. The combination of these data has been used to gain an understanding of the role of the prior-β grain structure in the formation of specific morphologies and spatial misorientation distributions observed in the transformed α colony structures. It is hoped that this understanding can be used to develop transformation structures optimized for specific applications and to produce more physically realistic synthetic microstructures for use in simulations.

scholarly journals The Coherent X-ray Scattering Beamline at Taiwan Photon Source

2014 ◽  
Vol 70 (a1) ◽  
pp. C1747-C1747
Author(s):  
Jhih-Min Lin ◽  
Yu-Shan Huang ◽  
Chun-Yu Chen ◽  
U-Ser Jeng ◽  
Chung-Yuan Mou ◽  
...  
Keyword(s):  
Photon Energy ◽  
Vertical Direction ◽  
Spot Size ◽  
Beam Spot ◽  
X Ray ◽  
Beam Spot Size ◽  
X Ray Scattering ◽  
Sample Position ◽  
Photon Source ◽  
Ray Scattering

The coherent X-ray scattering beamline is one of the phase I beamlines designed for the Taiwan Photon Source, a new 3 GeV ring under construction at the National Synchrotron Radiation Research Center in Taiwan. By using a pair of 2m-long in-vacuum undulators, this beamline will provide a highly coherent beam for X-ray photon correlation spectroscopy principally; moreover, it will share a part of beamtime for small-angle X-ray scattering (SAXS) experiments with similar setup of the beamline. The operating photon energy is designed within the range of 5-20 keV. In vertical direction, the beam spot size at sample position is 1 μm with focusing mirror and by using 1D compound refractive lenses (CRLs) the beam spot size is 10 μm. The horizontal beam spot size is in the range of 1 to 10 μm with a two-stage focusing design. The vertical and horizontal transverse coherence lengths of the 10 μm2 beam spot size at the photon energy of 5 KeV are 212 and 6 μm at sample position respectively. Beside XPCS the beamline configuration can cope with the requirements of most SAXS experiments, including anomalous measurements and micro-beam mapping. In addition, the increasing biological SAXS demand is also considered and the on-line fast performance liquid chromatography (FPLC) will be enclosed for biological users.

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