FINITE ELEMENT ANALYSIS OF THERMAL NANOINDENTATION PROCESS AND ITS EXPERIMENTAL VERIFICATION
2008 ◽
Vol 22
(31n32)
◽
pp. 5949-5954
Keyword(s):
Pile Up
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In this paper, deformation behavior of Polymethylmethacrylate (PMMA) during thermal indentation was demonstrated by the finite element method using ABAQUS S/W. Forming conditions to reduce the elastic recovery and pile-up were proposed. Thermal nanoindentation experiments were carried out at the temperature range of 110 ~ 150 ° C . The indenter was modeled as a rigid surface. The finite element analysis (FEA) approach is capable of reproducing the loading-unloading behavior for a thermal nanoindentation test and thus comparison between the experimental data and numerical results were demonstrated. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.
2021 ◽
2013 ◽
Vol 367
◽
pp. 165-168
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2021 ◽
2013 ◽
Vol 321-324
◽
pp. 1757-1760
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2012 ◽
Vol 538-541
◽
pp. 828-832
2013 ◽
Vol 371
◽
pp. 478-482
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